Novel, Matched CTE Integrated Substrates for Power Electronics

Abstract

Rapid advances in high power electronic packaging require the development of new heat-sink/substrate materials. Advanced composites designed to provide thermal control as well as improved thermal conductivity have the potential to provide benefits in the removal of excess heat from electronic devices. Carbon-carbon (C-C)composites are under consideration for numerous electronic packaging applications. A new manufacturing process has been developed to produce high thermal conductivity (400 W/mK) C-C composites at greatly reduced cost (less than $50/lb). However, low CTE (0.25 × 10−6cm/cm °C) of C-C composites results in reduced fatigue life in chipon- board (COB) applications with silicon chips (CTE ≈ 2.6 × 10−6 cm/cm °C). A novel process was developed to convert the carbon matrix into the SiC matrix which retains the overall high composite thermal conductivity. This novel technology is well-suited for COB applications. Several types of coatings, such as CVD AIN, CVD Si and a polymer slurry-based low dielectric coating were applied to the C-SiC composite. Processing schemes were developed to produce crack-free coatings. Metallization of the dielectric coating was performed for the process integration with electronic devices. Thus, integrated substrates for power electronics were fabricated without the need of conventional metal/ceramic joining and associated high stresses. The properties of this new composite material for power electronics substrates are presented.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    D. D. Doane, Multichip Modulus Technology and Applications, New York, 1993, p. 502.

    Google Scholar 

  2. 2.

    W. Kowbel and J.C. Withers, MER Proceeding, 445, p. 37 (1997).

    Google Scholar 

  3. 3.

    D. D. Doane, Multichip Modulus Technology and Applications, New York, 1993, p. 471.

    Google Scholar 

Download references

Author information

Affiliations

Authors

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Kowbel, W., Xia, X., Bruce, C. et al. Novel, Matched CTE Integrated Substrates for Power Electronics. MRS Online Proceedings Library 515, 141–146 (1998). https://doi.org/10.1557/PROC-515-141

Download citation