X-Ray Photoemission Spectromicroscopy of Gan and AIGan

Abstract

We investigate here for the first time GaN and AIGaN films by using x-ray photoemission spectromicroscopy. As compared to conventional x-ray photoemission spectroscopy (XPS), spectromicroscopy can provide spatially resolved information on the chemical composition of the sample surface. The experimental results where obtained by using MAXIMUM, a scanning photoemission microscope installed on 12.0 undulator beamline at the Advanced Light Source (ALS), Berkelely, allowing for a spatial resolution of 100 nm. We investigate here GaN and AlGaN thin films grown on sapphire substrate by metalorganic chemical vapor deposition (MOCVD). The results clearly indicate the great potential of spectromicroscopy in investigating chemical inhomogeneity, inpurities and localization in GaN and AlGaN thin films.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    S. Nakamura, M Senoh, N. Iwasa, Jpn. J. Appl. Phys. 34, L797 (1995); S. Nakamura, M Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, K. Kiyoku, and W. Sugimoto, Jpn. J. Appl. Phys. 35, L74 (1996).

    CAS  Article  Google Scholar 

  2. 2.

    G. Martin, S. Strite, A. Botchkarev, A. Agarwal, H. Morkoc, W. R. Lambrecht, and B. Segall, Appl. Phys. Lett. 65, 610 (1994).

    CAS  Article  Google Scholar 

  3. 3.

    V. M. Bermudez, T. M. Jung, K. Doverspike, and A. E. Wickenden, J. Appl. Phys. 79, 110 (1996).

    CAS  Article  Google Scholar 

  4. 4.

    G. Margaritondo and F. Cerrina, Nucl. Instr. and Meth. A291, 26 (1990).

    CAS  Article  Google Scholar 

  5. 5.

    C. Capasso, A. K. Ray-Chaudhuri, W. Ng, S. Liang, R. K. Cole, J. Wallace, F. Cerrina, G. Margaritondo, J. H. Underwood, J. K. Kortright, and R. C. C. Perera, J. Vac. Sci. Technol. A9, 1248 (1991).

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to G. F. Lorusso.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Lorusso, G.F., Solak, H., Cerrina, F. et al. X-Ray Photoemission Spectromicroscopy of Gan and AIGan. MRS Online Proceedings Library 512, 393–398 (1998). https://doi.org/10.1557/PROC-512-393

Download citation