Nitridation of Substrates With Hydrazine Cyanurate for The Growth of Gallium Nitride

Abstract

The use of purified hydrazine cyanurate as a solid source of hydrazine in the low temperature nitridation of GaAs (100) and (111) and sapphire (0001) is demonstrated. Thenitridated surfaces were analyzed by X-ray Photoelectron Spectroscopy (XPS) for chemical composition and Atomic Force Microscopy for surface morphology. The GaAs surfaces were composed primarily of GaN, GaAs, and Ga2O3, and were as smooth as unprocessed standards. The nitridated sapphire surfaces were composed of A1NxO1-x and exhibited three-dimensional growth for long nitridation times.

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References

  1. 1.

    H. Morkog, A. Botchkarev, A. Salvador, and B. Sverdlov, J. Cryst. Growth 150, 887 (1995).

    Article  Google Scholar 

  2. 2.

    O. Brandt, H. Yang, J.R. Millhdiuser, A. Trampert, K. H. Ploog, Materials Science and Engineering B43 p. 215 (1997).

    CAS  Article  Google Scholar 

  3. 3.

    Z. Sitar, M. J. Paisley, B. Yan, J. Ruan, W. J. Choyke, and R. F. Davis in Diamond, Silicon Carbide, and Related Wide Bandgap Semiconductors, edited by Glass, R. Messier, and N. Fujimori (Mater. Res. Soc. Proc. 162, Pittsburgh, PA, 1990) p. 537.

  4. 4.

    M. T. Duffy, C. C. Wang, G. D. O’Clock, Jr., S. H. McFarlane III, and P. J. Zanzucchi, J. Electron. Mater. 2, 359 (1973).

    CAS  Article  Google Scholar 

  5. 5.

    W.A. Doolittle, S. Kang, T. Kropewnicki, S. Stock, P. Kohl, and A. Brown, submitted to J. Electron. Mat.

  6. 6.

    O.-H. Nam, M. D. Bremsen, T. S. Zheleva, and R. F. Davis, App. Phys. Lett. 71 (8), 2638 (1997)

    CAS  Article  Google Scholar 

  7. 7.

    T. Kropewnicki and P. Kohl, J. Vac. Sci. Technol. A 16 (1), 139 (1998).

    CAS  Article  Google Scholar 

  8. 8.

    O. Briot, J. P. Alexis, M. Tchounkeu, R. L. Aulombard, Materials Science and Engineering B43, 147 (1997).

    Article  Google Scholar 

  9. 9.

    J. Hedman, and N. Martensson, Phys. Scr. 22, 176 (1980).

    CAS  Article  Google Scholar 

  10. 10.

    G. Leonhardt, A. Berndtsson, J. Hedman, M. Klasson, R. Nilsson, Phys. Status Solidi (b) 60, 241 (1973).

    CAS  Article  Google Scholar 

  11. 11.

    Y. Mizokawa, H. Iwasaki, R. Nishitani, S. Nakamura, J. Electron Spectrosc. Relat. Phenom. 14, 129 (1978).

    CAS  Article  Google Scholar 

  12. 12.

    L. Ley, R. A. Pollak, F. R. McFeely, S. P. Kowalczyk, D. A. Shirley, Phys. Rev. B 9, 600 (1974).

    CAS  Article  Google Scholar 

  13. 13.

    R. J. Hauenstein, D. A. Collins, M. L. O’Steen, Z. Z. Bandic, and T. C. McGill in Film Synthesis and Growth Using Energetic Beams, edited by H. A. Atwater (Mater. Res. Soc. Proc. 388, Pittsburgh, PA, 1995) p. 259.

  14. 14.

    G. E. McGuire, G.K.K. Schweitzer, T. A. Carlson, Inorg. Chem. 12, 2451 (1973).

    Article  Google Scholar 

  15. 15.

    J. A. Taylor, J. Vac. Sci. Technol. 20, 751 (1982).

    CAS  Article  Google Scholar 

  16. 16.

    J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, in Handbook of X-ray Photoelectron Spectroscopv, edited by J. Chastain (Perkin-Elmer Corporation, Eden Prairie, MN, 1992), p. 213.

  17. 17.

    K. Uchida, A. Watanabe, F. Yano, M. Kouguchi, T. Tanaka, and S. Minagawa, J. Appl. Phys. 79, 3487 (1996).

    CAS  Article  Google Scholar 

  18. 18.

    C. Heinlein, J. Grepstad, T. Berge, H. Reichert, App. Phys. Lett. 71 (3), 341 (1997).

    CAS  Article  Google Scholar 

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Correspondence to T. J. Kropewnicki.

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Kropewnicki, T.J., Kohl, P.A. Nitridation of Substrates With Hydrazine Cyanurate for The Growth of Gallium Nitride. MRS Online Proceedings Library 512, 227–232 (1998). https://doi.org/10.1557/PROC-512-227

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