Abstract
The barrier heights of various Schottky diodes in n-type 4H-SiC and 6H-SiC is estimated from published data at Si-face and C-face, respectively, employing the LSM (least square method). It is found that the barrier height in SiC Schottky diode is a linear function of metal work function as φB. =a φm + b. The a is about 0.63 ∼ 0.72. The already established analytic expression in [9] is compared with the estimated linear expression and revised by employing the empirical factor, α between the upper and lower boundary of interface state density, DIT. The values of a lie in 1.65 ∼ 32.1.
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J. R. Waldrop, R. W. Grant, et al., J. Appl. Phys., Vol.72, No.10, pp. 4757–4760 (1992).
J. R. Waldrop, R. W. Grant, Appl. Phys. Lett., Vol.62, pp.2685–2687 (1993).
S. Karmann, W. Suttrop, A. Schoner, et al., J. Appl. Phys., Vol.72, pp. 5437–5442 (1992).
A. Itoh, H. Akita, T. Kitomo, and H. Matsunami, Appl. Phys. Lett., Vol.65, pp. 1400–1402 (1994).
A. Itoh, T. Kitomo, and H. Matsunami, ‘Proc. 95 ISPSD, pp. 101–106 (1995).
L. A. Lipkin and J. W. Palmour, J. lectronic Materials, Vol.25, No.5, pp. 909–915 (1996)
Nils Lundberg and Mikael Ostling, J. Electrochem. Soc., Vol.143, No.5, pp. 1662–1667 (1996).
S. Y. Wu and R. B. Campbell, Solid-State Electronics, Vol.17, pp.683–687 (1974).
S. M. Sze, Physics of Semiconductor Devices, 2nd Edition, Wiley, pp. 270–297 (1981)
Scott T. Sheppard, Michael R. Melloch, and James A. Cooper, Jr.,IEEE Trans. ED., Vol.41., No. 7, pp. 1257–1263 (1994).
Charles E. Weitzel, John W. Palmour, Calvin H. Carter, Jr., Karen Moore, Kevin J. Nordquist, et al., IEEE Trans.ED, Vol.43, No. 10, Oct., pp. 1732–1739 (1996)
Mohit Bhatnagar and B. Jayant Baliga, IEEE Trans. ED., Vol.40, No.3, Mar., pp.645–655 (1993)
Karen E. Moore, Charles E. Weitzel, Kevin J. Nordquist, et.al., IEEE EDL., Vol.18, No.2, Feb., pp.69–70 (1997)
M. R. Melloch and J. A. Cooper, Jr., MRS Bulletin, Mar., Vol.22, No.3, pp.42–47 (1997)
Dale M. Brown, Mario Ghezzo, James Kretchmer, et al. IEEE Trans. ED, Vol.41, No.4, Apr, pp.618–620 (1994)
Jurgen H. Werner and Herbert H. Guttler, J. Appl. Phys., Vol.69, No.3, pp. 1522–1533 (1991).
D. J. Larkin, MRS Bulletin, Mar., Vol.22, No.3, pp.36–41 (1997)
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Lee, YS., Kim, D.Y., Oh, J.K. et al. The Estimation and revision of barrier heights in 4H- SiC and 6H-sic Schottky Diodes. MRS Online Proceedings Library 512, 175–180 (1998). https://doi.org/10.1557/PROC-512-175
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DOI: https://doi.org/10.1557/PROC-512-175