The Estimation and revision of barrier heights in 4H- SiC and 6H-sic Schottky Diodes

MRS Online Proceedings Library volume 512, pages175–180(1998)Cite this article

Abstract

The barrier heights of various Schottky diodes in n-type 4H-SiC and 6H-SiC is estimated from published data at Si-face and C-face, respectively, employing the LSM (least square method). It is found that the barrier height in SiC Schottky diode is a linear function of metal work function as φB. =a φm + b. The a is about 0.63 ∼ 0.72. The already established analytic expression in [9] is compared with the estimated linear expression and revised by employing the empirical factor, α between the upper and lower boundary of interface state density, DIT. The values of a lie in 1.65 ∼ 32.1.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

US$ 39.95

Tax calculation will be finalised during checkout.

References

  1. 1.

    J. R. Waldrop, R. W. Grant, et al., J. Appl. Phys., Vol.72, No.10, pp. 4757–4760 (1992).

    CAS  Article  Google Scholar 

  2. 2.

    J. R. Waldrop, R. W. Grant, Appl. Phys. Lett., Vol.62, pp.2685–2687 (1993).

    CAS  Article  Google Scholar 

  3. 3.

    S. Karmann, W. Suttrop, A. Schoner, et al., J. Appl. Phys., Vol.72, pp. 5437–5442 (1992).

    CAS  Article  Google Scholar 

  4. 4.

    A. Itoh, H. Akita, T. Kitomo, and H. Matsunami, Appl. Phys. Lett., Vol.65, pp. 1400–1402 (1994).

    CAS  Article  Google Scholar 

  5. 5.

    A. Itoh, T. Kitomo, and H. Matsunami, ‘Proc. 95 ISPSD, pp. 101–106 (1995).

    Google Scholar 

  6. 6.

    L. A. Lipkin and J. W. Palmour, J. lectronic Materials, Vol.25, No.5, pp. 909–915 (1996)

    CAS  Google Scholar 

  7. 7.

    Nils Lundberg and Mikael Ostling, J. Electrochem. Soc., Vol.143, No.5, pp. 1662–1667 (1996).

    CAS  Article  Google Scholar 

  8. 8.

    S. Y. Wu and R. B. Campbell, Solid-State Electronics, Vol.17, pp.683–687 (1974).

    CAS  Article  Google Scholar 

  9. 9.

    S. M. Sze, Physics of Semiconductor Devices, 2nd Edition, Wiley, pp. 270–297 (1981)

    Google Scholar 

  10. 10.

    Scott T. Sheppard, Michael R. Melloch, and James A. Cooper, Jr.,IEEE Trans. ED., Vol.41., No. 7, pp. 1257–1263 (1994).

    Article  Google Scholar 

  11. 11.

    Charles E. Weitzel, John W. Palmour, Calvin H. Carter, Jr., Karen Moore, Kevin J. Nordquist, et al., IEEE Trans.ED, Vol.43, No. 10, Oct., pp. 1732–1739 (1996)

    CAS  Article  Google Scholar 

  12. 12.

    Mohit Bhatnagar and B. Jayant Baliga, IEEE Trans. ED., Vol.40, No.3, Mar., pp.645–655 (1993)

    CAS  Article  Google Scholar 

  13. 13.

    Karen E. Moore, Charles E. Weitzel, Kevin J. Nordquist, et.al., IEEE EDL., Vol.18, No.2, Feb., pp.69–70 (1997)

    Article  Google Scholar 

  14. 14.

    M. R. Melloch and J. A. Cooper, Jr., MRS Bulletin, Mar., Vol.22, No.3, pp.42–47 (1997)

    CAS  Article  Google Scholar 

  15. 15.

    Dale M. Brown, Mario Ghezzo, James Kretchmer, et al. IEEE Trans. ED, Vol.41, No.4, Apr, pp.618–620 (1994)

    CAS  Article  Google Scholar 

  16. 16.

    Jurgen H. Werner and Herbert H. Guttler, J. Appl. Phys., Vol.69, No.3, pp. 1522–1533 (1991).

    CAS  Article  Google Scholar 

  17. 17.

    D. J. Larkin, MRS Bulletin, Mar., Vol.22, No.3, pp.36–41 (1997)

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

  1. School of Electrical Eng., Seoul Nat’l Univ., 56-1 Shinlim-dong, Kwanak-ku, 151-724, Seoul, Korea

    You-Sang Lee, D. Y. Kim, J. K. Oh, M. K. Han & Y. I. Choi

  2. School of Electronics Eng., Ajou Univ., 5 Wonchun-dong, Suwon, 442-749, Korea

    Y. I. Choi

Authors
  1. You-Sang Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. D. Y. Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. J. K. Oh
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. K. Han
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Y. I. Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to You-Sang Lee.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Lee, YS., Kim, D.Y., Oh, J.K. et al. The Estimation and revision of barrier heights in 4H- SiC and 6H-sic Schottky Diodes. MRS Online Proceedings Library 512, 175–180 (1998). https://doi.org/10.1557/PROC-512-175

Download citation