Interface Roughness in Strained Si/SiGe Multilayers


Diffuse x-ray reflection from a SiGe/Si multilayer grown pseudomorphically on slightly miscut Si(OOl) substrates has been studied theoretically and experimentally. In the framework of the Distorted-Wave Born Approximation (DWBA), we demonstrated that the distribution of the diffusely scattered intensity gives conclusive information on both the amount and the in-plane and inter-plane correlation properties of the interface roughness. The best model for the description of the interface-morphology was found to be a combination of a two-level model and a staircase model.

This is a preview of subscription content, access via your institution.


  1. 1.

    Y. H. Xie, D. Monroe, E. Fitzgerald, P. J. Silverman, F. A. Thiel, G. P. Watson, Appl. Phys. Lett. 63, 2263 (1993).

    CAS  Article  Google Scholar 

  2. 2.

    C. R. Bolognesi, H. Kroemer, J. H. English, Appl. Phys. Lett. 61, 213 (1992).

    CAS  Article  Google Scholar 

  3. 3.

    R. L. Headrick, J.-M. Baribeau, Phys. Rev. B 48, 9174 (1993).

    CAS  Article  Google Scholar 

  4. 4.

    R. L. Headrick, J.-M. Baribeau, J. Vac. Sci. Technol. B 11, 1514 (1993).

    CAS  Article  Google Scholar 

  5. 5.

    Y. H. Phang, C. Teichert, M. G. Lagally, L. J. Peticolas, J. C. Bean, E. Kasper, Phys. Rev. B 50, 14435 (1994).

    CAS  Article  Google Scholar 

  6. 6.

    R. L. Headrick, J.-M. Baribeau, Y. E. Strausser, Appl. Phys. Let. 66, 96 (1995).

    CAS  Article  Google Scholar 

  7. 7.

    S. K. Sinha, E. B. Sirota, S. Garoff, H. B. Stanley, Phys. Rev. B 38, 2297 (1988).

    CAS  Article  Google Scholar 

  8. 8.

    V. Holy, T. Baumbach, Phys. Rev. B 51, 10668 (1994).

    Article  Google Scholar 

  9. 9.

    D. K. G. de Boer, Phys. Rev. B 51, 5297 (1995).

    Article  Google Scholar 

  10. 10.

    C. S. Lent, P. I. Cohen, Surf. Sci. 121, 121 (1984) and Surf. Sci. 161, 39 (1985).

    Article  Google Scholar 

  11. 11.

    E. Spiller, D. Steams, and M. Krumrey, J. Appl. Phys. 74, 107 (1993).

    CAS  Article  Google Scholar 

  12. 12.

    V. M. Kaganer, S. A. Stepanov, R. Kôhler, Phys. Rev. B 52, 16369 (1995).

    CAS  Article  Google Scholar 

  13. 13.

    Z. H. Ming, A. Krol, Y. L. Soo, Y. H. Kao, J. S. Park, K. L. Wang, Phys. Rev. B 47, 16373 (1993).

    CAS  Article  Google Scholar 

  14. 14.

    T. Salditt, T. H. Metzger, J. Peisl, Phys. Rev. Lett. 73, 2228 (1994).

    CAS  Article  Google Scholar 

  15. 15.

    V. Holy et al., to be published Cambridge University Press New York, USA

Download references

Author information



Corresponding author

Correspondence to A. A. Darhuber.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Darhuber, A.A., Holy, V., Stangl, J. et al. Interface Roughness in Strained Si/SiGe Multilayers. MRS Online Proceedings Library 448, 153–158 (1996).

Download citation