A New, Nearly Single-Domain Surface Structure of Homoepitaxial Diamond (001) Films

Abstract

Boron-doped homoepitaxial diamond films were grown on natural diamond (001) substrates using microwave-assisted plasma chemical vapor deposition techniques. The surface structures were investigated using scanning tunneling microscopy (STM). This showed a dimer-type 2×1 reconstruction structure with single-layer steps where dimer rows on the upper terrace are normal to or parallel to the step edges. We found that dimer rows parallel to the step edges are much longer than those normal to the step edges. The nearly single-domain surface structure observed by STM is in agreement with the low-energy electron diffraction (LEED) patterns from these surfaces. The high atomic resolution STM image showed that the local 1×1 configurations exist.

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Acknowledgments

The authors wish to express their thanks to Dr. R. Diehl for discussion about STM and LEED results. This work was supported in part by National Science Foundation under Grant No. DMR 9117061 and DMR 9522566, Office of Naval Research BMDO Contract N0000-95-I-0905, and Republic of China National Science Council Grant No. 84IA01B032.

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Correspondence to Yalei Kuang.

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Kuang, Y., Lee, N., Badzian, A. et al. A New, Nearly Single-Domain Surface Structure of Homoepitaxial Diamond (001) Films. MRS Online Proceedings Library 423, 433–437 (1996). https://doi.org/10.1557/PROC-423-433

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