Structuring of Conducting Polymers by Ion Implantation

Abstract

Conducting polypyrrole polymer films have been modified by ion implantation. The resulting cross linking leads to changes in resistivity and electrochemical behaviour. By ion implantation through masks or with a focused ion beam lateral structures can be produced which can be imaged by scanning electron microscopy and optical absorption. The implanted polypyrrole layers can be removed by electrochemical treatment while not implanted regions can be electroplated. Therefore in combination with electrochemical treatment three dimensional structures have been generated and were investigated by atomic force microscopy. In order to study structures in the submicrometer range implantation experiments with a focused ion beam were performed and the minimal line widths were investigated by scanning electron microscopy.

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Correspondence to Klaus Edinger.

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Edinger, K., Schiestel, S. & Wolf, G.K. Structuring of Conducting Polymers by Ion Implantation. MRS Online Proceedings Library 396, 317 (1995). https://doi.org/10.1557/PROC-396-317

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