LiTaO3 single crystals have been implanted with 100 keV oxygen ions at room temperature with doses of 1×1014 /cm2, 6xl014/cm2, 1.2x1015/cm2, 6xl015/cm2, and 2xl016/cm2. Annealing temperatures ranged from 550 °C to 1075 °C. RBS-channeling and TEM were used for characterization. For partially damaged samples, complete recovery of the crystalline structure was achieved after annealing at 550 °C, which is below the Curie temperature. For totally amorphized samples, thermal annealing induced multidomain growth. These domains extend beyond the original amorphous/crystal interface deep into bulk (1 – 1.5 μm ).
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P.D. Townsend, Nucl. Instr. and Methods, B 89, p. 270 (1994).
P.J. Chandler and P.D. Townsend, Nucl. Instr. and Methods, B 80/81, p. 1135 (1993).
L. Thyler, J. Lightwave, Technol., 6, p.847 (1988).
G.L. Tangonan, M.K. Bamoski, J.F. Lotspeich, and A. Lea, Appl. Phys. Letters, 30, p.238 (1977).
T. Findarkly, J. Farina, P. Svchoski, and F. Leonberger, in Technical Digest of 10 th Topical Meeting on Integrated and Guided-wave Optics, (Optical Society of American, Washington, DC, 1989), Paper WCC2.
V. Norkus, G. Hofmann, S. Mohlong, H. Budzier, Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1685, p. 155 (1992).
A. Yukara, T. Mizutani, N. Hosaka, J. Yanada, S. Kobayashi, IEEE 1989 Ultrasonics Symposium Proceedings, Vol. 1, p.343 (1989)
J.F. Ziegler, J.P. Biearsack, and U.L. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985.
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Zhang, Z., Rusakova, I.A. & Chu, W.K. Ion Induced Damage and their Annealing in LiTaO3 Single Crystal. MRS Online Proceedings Library 396, 273 (1995). https://doi.org/10.1557/PROC-396-273