Abstract
In-situ stress measurements on single crystal MgO and A1203 have been performed during ion irradiation. A cantilevered beam sample arrangement was used, with the stress in the implanted layer determined from the deflection of the sample as measured by the change in capacitance between the free end of the sample and a reference electrode. Point defect concentrations are obtained by dividing the volume strain by the defect relaxation volume, with saturation values of 0.8 to 1.2% obtained for 1.0 MeV Ne, Ar and Kr irradiations. Defect production is sublinear with dose, with an efficiency of less than 25% compared to Kinchin-Pease predictions. Ionization induced annealing is evaluated with 1.0 MeV He and 1.0 MeV H irradiations following heavy ion irradiation.
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References
G.G. Stoney, Proc. R. Soc. (London), A 32, p. 172, (1909).
A. Brennerand and S. Senderoff, J. Res. Nat. Bur. Stan., 42, p. 105, (1949).
D.S. Gardner and P.A. Flinn, J. App. Phys., 67, p. 1831,(1990).
P. Ehrhart, Mat. Soc. Proc., Vol. 41, p. 13, (1985).
K.L. Chopra, Thin Film Phenomena, McGraw-Hill, New York, (1969).
W.D. Nix, Met. Trans. A, 20A, p. 2217, (1989).
E.P. EerNisse, App. Phys. Let., 18, p. 581, (1971).
C.A. Volkert, J. App. Phys., 70, p. 3521, (1991).
G.W. Arnold, G.B. Krefft and C.B. Norris, App. Phys. Let., 25, p. 540, (1974).
G.B. Krefft, W. Beezhold and E.P. EerNisse, IEEE Trans. Nucl. Sci., N5-22, p.2247, (1975)
E.P. EerNisse, J. Appl. Phys., 45, p. 167, (1974).
C.B. Norris and E.P. EerNisse, J. Appl. Phys., 45, p. 3876, (1974).
G.B. Krefft, J. Vac. Sci. Tech., 14, p. 533, (1977).
J.F. Ziegler, J.P. Biersack and U. Littmark, The Stopping and Range of Ions In Solids, Pergamon, New York, (1985).
M.J.L. Sangster and D.K. Rowell, Phil. Mag. A, 44, p. 613, (1981).
R.S. Averback, P. Ehrhart, A.I. Popov and A. Van Sambeek, Rad. Eff. & Def. Sol., 133/134, (1995).
B.D. Evans, J. Comas, P.R. Malmberg, Phys. Rev. B, 6, p. 2453, (1972).
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Van Sambeek, A.I., Averback, R.S. Cantilever Beam Stress Measurements During Ion Irradiation. MRS Online Proceedings Library 396, 137 (1995). https://doi.org/10.1557/PROC-396-137
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DOI: https://doi.org/10.1557/PROC-396-137