NH3 as Nitrogen Source in MBE growth of GaN

MRS Online Proceedings Library volume 395, pages135–139(1995)Cite this article

Abstract

We report on the growth of GaN in GSMBE using NH3 as nitrogen source. Special focus will be on the NH3 cracking, where we applied an On Surface Cracking technique (OSC). Using OSC we achieve photoluminescence linewidths as narrow as 5.5meV (5K) and mobilities of 220 cm2/Vs at room temperature.

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

US$ 39.95

Tax calculation will be finalised during checkout.

References

  1. 1

    M.E. Lin, Z. Ma, F.Y. Huang, Z.F. Fan, L.H. Allen, and H. Morkoç, Appl. Phys. Lett. 64, 1003, (1994).

    CAS  Article  Google Scholar 

  2. 2

    I. Akasaki and H. Amano, J. Cryst. Growth 146, 455 (1995).

    CAS  Article  Google Scholar 

  3. 3

    S. Nakamura, T. Mukai and M. Senoh, J. Appl. Phys. 76, 8189 (1994).

    Article  Google Scholar 

  4. 4

    R. J. Molnar, R. Singh and T. D. Moustakas, J.Electronic Materials 4, 275 (1995).

  5. 5

    M. Kamp, M. Mayer, A. Pelzmann, S. Menzel, H. Y. Chung, H. Sternschulte and K. J. Ebeling, in Proceedings of Topical Workshop on III-V Nitrides, Nagoya, Japan, 1995.

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

  1. Department of Optoelectronics, University of Ulm, D-89069, Ulm, Germany

    M. Kamp, M. Mayer, A. Pelzmann, A. Thies, H. Y. Chung & K. J. Ebeling

  2. Department of Semiconductor Physics, University of Ulm, D-89069, Ulm, Germany

    H. Sternschulte

  3. Department of Experimental Physics, University of Ulm, D-89069, Ulm, Germany

    O. Marti

Authors
  1. M. Kamp
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Mayer
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. Pelzmann
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. Thies
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. H. Y. Chung
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. H. Sternschulte
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. O. Marti
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. K. J. Ebeling
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. Kamp.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Kamp, M., Mayer, M., Pelzmann, A. et al. NH3 as Nitrogen Source in MBE growth of GaN. MRS Online Proceedings Library 395, 135–139 (1995). https://doi.org/10.1557/PROC-395-135

Download citation