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Residual Stresses in Tungsten Lines: Analysis of Experimental- (Micro-Raman Spectroscopy, Xrd) and Numerical Results

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Abstract

Micro-Raman spectroscopy, XRD, and analytical modelling are used to study stresses in and surrounding tungsten lines of different widths and spacing. The stress in the lines and in the adjacent substrate is calculated using a concentrated- and a distributed edge force model. Both models are adapted such that the substrate-stress components can also be calculated for an array of lines. The results from XRD and micro-Raman spectroscopy and the results from the distributed edge force model are in agreement. The combination of data from the two experimental techniques is shown to give some important feed-back to the theoretical models.

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Authors and Affiliations

  1. IMEC, Kapeldreef 75, B-3001, Leuven, Belgium

    I. De Wolf & H. E. Maes

  2. INP Grenoble BP75, Domaine Universitaire, 38402, France

    J. Moffet & M. Ignat

Authors
  1. I. De Wolf
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  2. H. E. Maes
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  3. J. Moffet
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  4. M. Ignat
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De Wolf, I., Maes, H.E., Moffet, J. et al. Residual Stresses in Tungsten Lines: Analysis of Experimental- (Micro-Raman Spectroscopy, Xrd) and Numerical Results. MRS Online Proceedings Library 391, 109 (1995). https://doi.org/10.1557/PROC-391-109

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  • DOI: https://doi.org/10.1557/PROC-391-109

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