Residual Stresses in Tungsten Lines: Analysis of Experimental- (Micro-Raman Spectroscopy, Xrd) and Numerical Results

Abstract

Micro-Raman spectroscopy, XRD, and analytical modelling are used to study stresses in and surrounding tungsten lines of different widths and spacing. The stress in the lines and in the adjacent substrate is calculated using a concentrated- and a distributed edge force model. Both models are adapted such that the substrate-stress components can also be calculated for an array of lines. The results from XRD and micro-Raman spectroscopy and the results from the distributed edge force model are in agreement. The combination of data from the two experimental techniques is shown to give some important feed-back to the theoretical models.

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References

  1. 1

    F.B. Kaufman, D.B. Thompson, R.E. Broadie, M.A. Jaso, W.L. Guthrie, D.J. Pearson, MB. Small, J. Electrochem. Soc., 138(11), 3460 (1991).

    CAS  Article  Google Scholar 

  2. 2

    P. Gergaud, Doctoral Thesis, ENSAM, Paris (1992).

    Google Scholar 

  3. 3

    L. Maniguet, M. Ignat, M. Dupeux, J.J. Bachman, and Ph. Normandon. Mat. Res. Soc. Symp. Proc. 309, 217 (1993)

    CAS  Article  Google Scholar 

  4. 4

    S. M. Hu, Appl. Phys. Lett. 32(1), 5 (1978)

    CAS  Article  Google Scholar 

  5. 5

    J. Vanhellemont, S. Amelinckx, and C. Claeys, J. Appl. Phys. 61, 2170 (1987)

    CAS  Article  Google Scholar 

  6. 6

    I. De Wolf, J. Vanhellemont, A. Romano-Rodriguez, H. Norstrom, and H.E. Maes, J. Appl. Phys. 71(2), (1992)

  7. 7

    S.M. Hu. J. Appl. Phys. 50(7), 4661 (1979)

    Article  Google Scholar 

  8. 8

    A. Mezin, J.-P. Chambard, J. Lepage and M. Nivoit. Thin Solid Films, 185, 57, (1990)

    Article  Google Scholar 

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De Wolf, I., Maes, H.E., Moffet, J. et al. Residual Stresses in Tungsten Lines: Analysis of Experimental- (Micro-Raman Spectroscopy, Xrd) and Numerical Results. MRS Online Proceedings Library 391, 109 (1995). https://doi.org/10.1557/PROC-391-109

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