Metal/Al2O3 Multilayers As High-Temperature X-Ray Mirrors


By if-sputtering we have prepared high-quality metal/Al2O3 (metal: Co, Pt, W) artificial multilayers on sapphire (1120) substrates. We obtain interface roughnesses of about 0.2 nm and x-ray reflectivities of nearly 100 % at the first satellite reflection using Cu Kα radiation. The multilayer structures remain stable up to 700°C – 900°C without appreciable loss in reflectivity. Annealing causes structural changes depending on the chosen metal. Pt/Al2O3 forms a coherent superlattice structure whereas Co and W exhibit a gradual internal oxidation at the metal/Al2O3 interface. Beyond 900°C all systems are destroyed.

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  1. [1]

    B.Y. Jin, J.B. Ketterson, Adv. Phys. 38, 215 (1989).

    Article  Google Scholar 

  2. [2]

    E. Spiller, “Multilayer optics for soft x-rays” in Physics, Fabrication, and Applications of Multilayered Structures, P. Dhez and C. Weisbuch, eds. (Plenum, New York, 1988), p. 284.

    Google Scholar 

  3. [3]

    E. Ziegler, Y. Lepetre, I. K. Schuller, E. Spiller, Appl. phys. Lett. 48, 1354 (1986). A. F. Jankowski, L. R. Schrawyer, M. A. Wall, J. Appl. Phys. 68, 5162 (1990). D. G. Stearns, M. B. Stearns, Y. Cheng, J. H. Stith, N. M. Ceglio, J. Appl. Phys. 67, 2415 (1990). U. Kleinberg, H.-J. Stock, A. Kloidt, B. Schmiedeskamp, U. Heizmann, S. Hopfe, and R. Scholz, Phys. Stat. Sol. A 145, 539 (1994).

    CAS  Article  Google Scholar 

  4. [4]

    Ch. Morawe and H. Zabel, J. Appl. Phys. 77, 1969 (1995).

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Morawe, C., Zabel, H. Metal/Al2O3 Multilayers As High-Temperature X-Ray Mirrors. MRS Online Proceedings Library 382, 363 (1995).

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