A novel laser-printing method for the manufacturing of the backplane circuits of active-matrix liquid-crystal displays (AMLCD) is proposed and demonstrated. Xerographic toner is used as an etch mask for amorphous silicon (a-Si:H) and for the seeding of metal lines. We also demonstrate for the first time the direct-print patterning of silicon on ∼ 50 μm thick glass foil.
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W. O’Mara, “AMLCD Manufacturing” in Seminar Lecture Notes, Vol. I, (Society for Information Display Seminars, San Jose, California, June 13–17, 1994), pp. M-3/1-40.
S. Morozumi, “Issues in Manufacturing Active-Matrix LCDs”, in Seminar Lecture Notes. Vol. II, (Society for Information Display Seminars, Boston, Massachusetts, May 18–22, 1992), pp. F-3/1-50.
US patents No. 5,188,918 (23 February 1993), and No. 5,232,810 (3 August 1993).
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Gleskova, H., Wagner, S. & Shen, D.S. Electrophotographic Patterning of a-Si:H. MRS Online Proceedings Library 377, 719–724 (1995). https://doi.org/10.1557/PROC-377-719