Electrophotographic Patterning of a-Si:H


A novel laser-printing method for the manufacturing of the backplane circuits of active-matrix liquid-crystal displays (AMLCD) is proposed and demonstrated. Xerographic toner is used as an etch mask for amorphous silicon (a-Si:H) and for the seeding of metal lines. We also demonstrate for the first time the direct-print patterning of silicon on ∼ 50 μm thick glass foil.

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Correspondence to H. Gleskova.

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Gleskova, H., Wagner, S. & Shen, D.S. Electrophotographic Patterning of a-Si:H. MRS Online Proceedings Library 377, 719–724 (1995). https://doi.org/10.1557/PROC-377-719

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