Electrophotographic Patterning of a-Si:H

MRS Online Proceedings Library volume 377, pages719–724(1995)Cite this article

Abstract

A novel laser-printing method for the manufacturing of the backplane circuits of active-matrix liquid-crystal displays (AMLCD) is proposed and demonstrated. Xerographic toner is used as an etch mask for amorphous silicon (a-Si:H) and for the seeding of metal lines. We also demonstrate for the first time the direct-print patterning of silicon on ∼ 50 μm thick glass foil.

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References

  1. 1.

    W. O’Mara, “AMLCD Manufacturing” in Seminar Lecture Notes, Vol. I, (Society for Information Display Seminars, San Jose, California, June 13–17, 1994), pp. M-3/1-40.

  2. 2.

    S. Morozumi, “Issues in Manufacturing Active-Matrix LCDs”, in Seminar Lecture Notes. Vol. II, (Society for Information Display Seminars, Boston, Massachusetts, May 18–22, 1992), pp. F-3/1-50.

  3. 3.

    US patents No. 5,188,918 (23 February 1993), and No. 5,232,810 (3 August 1993).

  4. 4.

    Available from DynaArt Design, Lancaster, CA 93536 or from Techniks, Ringoes, NJ 08551.

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Affiliations

  1. Department of Electrical Engineering, Princeton University, Princeton, 08544, NJ, USA

    H. Gleskova & S. Wagner

  2. Department of Electrical and Computer Engineering, University of Alabama in Huntsville, Huntsville, 35899, AL, USA

    D. S. Shen

Authors
  1. H. Gleskova
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  2. S. Wagner
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  3. D. S. Shen
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Corresponding author

Correspondence to H. Gleskova.

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Gleskova, H., Wagner, S. & Shen, D.S. Electrophotographic Patterning of a-Si:H. MRS Online Proceedings Library 377, 719–724 (1995). https://doi.org/10.1557/PROC-377-719

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