Visualization of Atmospheric Pressure Chemical Vapor Deposition and Powder Spray Pyrolysis by Laser Light Scattering

Abstract

Atmospheric Pressure Chemical Vapor Deposition (APCVD) and powder spray pyrolysis are both pyrolytic thin film deposition techniques that are used to coat glass with thin films at atmospheric pressure. In the present study, the fluid dynamics of each process was investigated by laser light scattering. For each system, a 193 nm ArF excimer laser pulsed at 7 Hz was used for the analysis. In the case of the APCVD reactor, the difference in Rayleigh scattering between helium injected in the reactor and ambient air was used to characterize the process. For the powder spray process, laser scattering off the sprayed powder was used. The effect of various parameters is discussed.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    M. L. Hitchman and K. F. Jensen in Chemical Vapor Deposition, Principles and Applications, ed M. L. Hitchman and K. F. Jensen, (Academic Press, New York, NY, 1993), 1–26.

  2. 2.

    Daniel Fried, T. Kushida, G. P. Reck, Gyung-Soo Kim and E. W. Rothe, Appl. Spec., 1993, 47, 1046–1057.

    CAS  Article  Google Scholar 

  3. 3.

    G. Kim, H. An, E. W. Rothe, L. M. Hitchcock, Y. Gu and G. P. Reck, Laser Applications in Combustion and Combustion Diagnostics II, SPIE, 1994, 2122, 79–82.

    Article  Google Scholar 

  4. 4.

    S. T. S. Vong, U. S. Patent # 4,397,671 (1983); W. G. Stinson, L. J. Schwer and S. T. S. Vong, U. S. Patent # 4,393,098 (1983).

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to Limin Mao.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Mao, L., Stewart, O., Reck, G.P. et al. Visualization of Atmospheric Pressure Chemical Vapor Deposition and Powder Spray Pyrolysis by Laser Light Scattering. MRS Online Proceedings Library 363, 51–56 (1994). https://doi.org/10.1557/PROC-363-51

Download citation