Abstract
Experimental measurements of the decomposition of methyltrichlorosilane (MTS), a common silicon carbide precursor, in a high-temperature flow reactor are presented. Methane, hydrogen chloride, and silicon tetrachloride are observed as products of the decomposition. Trapping experiments with acetylene and ethylene also detected SiCl3 as a decomposition product. Upper limits on the concentrations of any CH3Cl, HSiCl3, H2SiCl2, or H2C=SiCl2 which might form are provided. Quantitative measurements of product branching and MTS decomposition rates are presented. The results suggest a radical-chain mechanism for the decomposition in hydrogen but not in helium.
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Osterheld, T.H., Allendorf, M.D. The Decomposition of Methyltrichlorosilane in Hydrogen and Helium. MRS Online Proceedings Library 363, 27–32 (1994). https://doi.org/10.1557/PROC-363-27
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DOI: https://doi.org/10.1557/PROC-363-27