The Decomposition of Methyltrichlorosilane in Hydrogen and Helium

Abstract

Experimental measurements of the decomposition of methyltrichlorosilane (MTS), a common silicon carbide precursor, in a high-temperature flow reactor are presented. Methane, hydrogen chloride, and silicon tetrachloride are observed as products of the decomposition. Trapping experiments with acetylene and ethylene also detected SiCl3 as a decomposition product. Upper limits on the concentrations of any CH3Cl, HSiCl3, H2SiCl2, or H2C=SiCl2 which might form are provided. Quantitative measurements of product branching and MTS decomposition rates are presented. The results suggest a radical-chain mechanism for the decomposition in hydrogen but not in helium.

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References

  1. 1.

    J. Schlichting, Powder Metal. Inter. 12, 196, (1980).

    CAS  Google Scholar 

  2. 2.

    T. M. Besmann, B. W. Sheldon, R. A. Lowden and D. P. Stinton, Science 253, 1104, (1991).

    CAS  Article  Google Scholar 

  3. 3.

    J. N. Burgess and T. J. Lewis, Chemistry and Industry 76, (1974).

  4. 4.

    T. H. Osterheld, M. D. Allendorf and C. F. Melius, J. Phys. Chem. 98, 6995, (1994).

    CAS  Article  Google Scholar 

  5. 5.

    W. L. Fitch and A. D. Sauter, Anal. Chem. 55, 832, (1983).

    CAS  Article  Google Scholar 

  6. 6.

    F. W. Lampe, J. L. Franklin and F. H. Field, J. Am. Chem. Soc. 79, 6129, (1957).

    CAS  Article  Google Scholar 

  7. 7.

    M. D. Allendorf and T. H. Osterheld, Chemical Vapor Deposition of Refractory Metals and Ceramics III, edited by W. Y. Lee, B. M. Gallois, M. A. Pickering, (Mater. Res. Soc. 363, Pittsburgh, PA, 1995) see paper in this volume.

  8. 8.

    H. Sakurai, in Free Radicals Vol. II, edited by J. K. Kochi, (John Wiley and Sons, New York, 1973) p. 782.

    Google Scholar 

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Correspondence to Thomas H. Osterheld.

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Osterheld, T.H., Allendorf, M.D. The Decomposition of Methyltrichlorosilane in Hydrogen and Helium. MRS Online Proceedings Library 363, 27–32 (1994). https://doi.org/10.1557/PROC-363-27

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