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Properties of Piezoelectric PZT Thin Films for Microactuator Applications

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Abstract

The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating electric field reveals that extrinsic contributions to the dielectric permittivity become active at large fields. The DC electric field has the effect of freezing out the extrinsic contributions. The influence of the dielectric loss on the piezoelectric properties is discussed.

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References

  1. G.-A. Racine, R. Luthier and N. F. de Rooij, Proc. IEEE-MEMS, Fort Lauderdale, USA, 1993, p. 128.

    Google Scholar 

  2. A. M. Flynn, L. S. Tavrow, S. F. Bart, R. A. Brooks, D. J. Ehrlich, K. R. Udayakumar and L. E. Cross, J. Micromech. Systems 1 (1), 44 (1992).

    Article  Google Scholar 

  3. D. L. Polla, T. Tamagawa, C. Ye, P. Schiller, L. Pham, C.-Y. Tu, Proc. SPIE-Int. Soc. Opt. Eng. 1694, 173 (1992)

    CAS  Google Scholar 

  4. P. Muralt, M. Kohli, T. Maeder, A. Kholkin, K. G. Brooks, and N. Setter, submitted to Sensors and Actuators A

  5. K. G. Brooks, D. Damjanovic, N. Setter, Ph. Luginbuhl, G.A. Racine, and N.F. de Rooij, Proc. 9th ISAF, The Pennsylvania State University, University Park, PA, Aug. 7-10, 1994 (to be published).

    Google Scholar 

  6. K. Brooks, D. Damjanovic, A. Kholkin, I. M. Reaney, N. Setter, Ph. Luginbuhl, G. A.- Racine, N. F. de Rooij, and A. Saaman, Proc. 6th ISIF, Monterey, CA, March 14-16, 1994 (to be published).

    Google Scholar 

  7. Z. Surowiak, D. Czekaj, A. M. Margolin, E. V. Sviridov, V. A. Aleshin, and V. P. Dudkevich, Thin Solid Films 214, 78 (1992).

    Article  CAS  Google Scholar 

  8. J. Chen, K. R. Udayakumar, K. G. Brooks, and L. E. Cross in Ferroelectric Thin Films II, ed. by A. I. Kingon, E. R. Myers and B. Tuttle (Mat. Res. Soc. Proc. 243, Pittsburgh, PA, 1992) pp. 361–366.

    CAS  Google Scholar 

  9. J.-F Li, D. D. Viehland, T. Tani, C. D. E. Lakeman, and D. A. Payne, J. Appl.Phys. 75, 442 (1994).

    Article  CAS  Google Scholar 

  10. K. Lefki and G. J. M. Dormans, J.Appl.Phys. 76, 1764 (1994).

    Article  Google Scholar 

  11. Q. M. Zhang, W. Y. Pan, and L. E. Cross, J. Appl. Phys. 63, 2492 (1988).

    Article  CAS  Google Scholar 

  12. J.-F Li, P. Moses, and D. Viehland, Ferroelectrics 153, 365 (1994).

    Article  Google Scholar 

  13. K. L. Lewis and K. F. Dexter in Ferroelectric Thin Films III, ed. by E. R. Mayers et al. (Mat. Res. Soc. Symp. 310, Pittsburgh, PA) pp.99–105.

  14. B. Jaffe, W. R. Cook, and H. Jaffe, Piezoelectric Ceramics (Academic Press, NY, 1971) p 146.

    Google Scholar 

  15. S. Li, W. Cao, and L.E. Cross, J. Appl. Phys. 69 (10), 7219 (1991).

    Article  CAS  Google Scholar 

  16. E. I. Bondarenko, V. Yu. Topolov, and A. V. Turik, Ferroelectrics Lett. 13, 13 (1991).

    Article  CAS  Google Scholar 

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Damjanovic, D., Brooks, K.G., Kholkin, A. et al. Properties of Piezoelectric PZT Thin Films for Microactuator Applications. MRS Online Proceedings Library 360, 429–434 (1994). https://doi.org/10.1557/PROC-360-429

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  • DOI: https://doi.org/10.1557/PROC-360-429

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