Pulsed Laser Deposition of ZnO Thin Films for Piezoelectric Applications

Abstract

Transparent, insulating ZnO thin films have been deposited in-situ by pulsed laser deposition (PLD) from sintered targets. Films were deposited on substrates of fused quartz, <0001> A12O3, polycrystalline and textured (111) Au, at several substrate deposition temperatures (TSubstrate ≤ 700° C) and background oxygen pressures (P =≤300 mTorr). Film structure, morphology and electrical properties were characterized by X-ray diffraction, Rutherford backscattering spectrometry, optical properties were characterized by infrared transmission and reflection, and electrical resistivity was measured normal to the films. Films were crystalline, phase pure, and c-axis oriented. ZnO films deposited onto fused quartz and <0001> sapphire showed x-ray rocking curve full width at half maxima of 5° and 0.34°, respectively. The structure of ZnO films deposited on (111) textured Au was sensitive to the degree of texturing in the Au. The resistivity of PLD ZnO films was 61-63 kΩcm which was a factor of three improvement over sputter deposited films. Deposition of Au by both PLD and IBAD showed a negative correlation between the crystalline texturing and film adherence.

This is a preview of subscription content, access via your institution.

References

  1. 1]

    R.J. Brook, R.W. Cahn and M.B. Bever, Concise Encyclopedia of Advanced Ceramic Materials, (1991) Pergamon Press, Oxford

    Google Scholar 

  2. 2]

    A.R. Hutson, Phys. Rev. Lett. 4, 505 (1960)

    CAS  Article  Google Scholar 

  3. 3]

    F. C. M. Van de Pol, Ceramic Bulletin 69 1959–1965 (1990)

    Google Scholar 

  4. 4]

    J.G. Smits and W.-S. Choi, Proc. 1994 IEEE International Control Symp. 139 (1994) IEEE cat. # 94CH3446-2

  5. 5]

    W Tjhen, T. Tamagawa, C.-P. Ya, C.-C. Hsueh, P. Schiller, and D.L. Polla IEEE #91CH2957-9

  6. 6]

    D.B. Chrisey and G.K. Hubler, Pulsed Laser Deposition of Thin Films (1994) John Wiley and Sons, Inc., New York

    Google Scholar 

  7. 7]

    N.J. Ianno, L. McConville, N. Shaikh, S. Pittal and P.G. Snyder, Thin Solid Films 220 92 (1992)

    CAS  Article  Google Scholar 

  8. 8]

    S. Amirhaghi, V. Craciun, F. Beech, M. Vickers, S. Tarling, P. Barnes and I.W. Boyd, Mat. Res. Soc. Symp. Proc. 285 489 (1993)

    CAS  Article  Google Scholar 

  9. 9]

    V. Craciun, J. Elders, J.G.E. Gardeniers and I.W. Boyd, Appl. Phys. Lett. 65, (1994)

  10. 10]

    F.A. Smidt Int. Mat. Rev. 35, 61 (1990)

    CAS  Article  Google Scholar 

  11. 11]

    J.K. Hirvonen, Mat. Sci. Rep. 6, 215 (1991)

    CAS  Article  Google Scholar 

  12. 12]

    W.-K. Chu, J.W. Mayer and M.-A. Nicolet, Backscattering Spectrometry, (1978) Academic Press, London

    Book  Google Scholar 

  13. 13]

    available from Computer Graphics Services, Ithaca, NY

  14. 14]

    K. Kushida and H. Takeuchi, J. Appl. Phys. 56 1133 (1984)

    CAS  Article  Google Scholar 

  15. 15]

    P.J. Martin, W.G. Sainty, and R.P. Netterfield, Vacuum 35, 621 (1985)

    CAS  Article  Google Scholar 

  16. 16]

    J. Hu and R.G. Gordon, Solar Cells 30, 437 (1991)

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Donovan, E., Horwitz, J., Carosella, C. et al. Pulsed Laser Deposition of ZnO Thin Films for Piezoelectric Applications. MRS Online Proceedings Library 360, 395–400 (1994). https://doi.org/10.1557/PROC-360-395

Download citation