Skip to main content
SpringerLink
Log in

Pulsed Laser Deposition of ZnO Thin Films for Piezoelectric Applications

  • Published:
MRS Online Proceedings Library Aims and scope

Abstract

Transparent, insulating ZnO thin films have been deposited in-situ by pulsed laser deposition (PLD) from sintered targets. Films were deposited on substrates of fused quartz, <0001> A12O3, polycrystalline and textured (111) Au, at several substrate deposition temperatures (TSubstrate ≤ 700° C) and background oxygen pressures (P =≤300 mTorr). Film structure, morphology and electrical properties were characterized by X-ray diffraction, Rutherford backscattering spectrometry, optical properties were characterized by infrared transmission and reflection, and electrical resistivity was measured normal to the films. Films were crystalline, phase pure, and c-axis oriented. ZnO films deposited onto fused quartz and <0001> sapphire showed x-ray rocking curve full width at half maxima of 5° and 0.34°, respectively. The structure of ZnO films deposited on (111) textured Au was sensitive to the degree of texturing in the Au. The resistivity of PLD ZnO films was 61-63 kΩcm which was a factor of three improvement over sputter deposited films. Deposition of Au by both PLD and IBAD showed a negative correlation between the crystalline texturing and film adherence.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R.J. Brook, R.W. Cahn and M.B. Bever, Concise Encyclopedia of Advanced Ceramic Materials, (1991) Pergamon Press, Oxford

    Google Scholar 

  2. A.R. Hutson, Phys. Rev. Lett. 4, 505 (1960)

    Article  CAS  Google Scholar 

  3. F. C. M. Van de Pol, Ceramic Bulletin 69 1959–1965 (1990)

    Google Scholar 

  4. J.G. Smits and W.-S. Choi, Proc. 1994 IEEE International Control Symp. 139 (1994) IEEE cat. # 94CH3446-2

  5. W Tjhen, T. Tamagawa, C.-P. Ya, C.-C. Hsueh, P. Schiller, and D.L. Polla IEEE #91CH2957-9

  6. D.B. Chrisey and G.K. Hubler, Pulsed Laser Deposition of Thin Films (1994) John Wiley and Sons, Inc., New York

    Google Scholar 

  7. N.J. Ianno, L. McConville, N. Shaikh, S. Pittal and P.G. Snyder, Thin Solid Films 220 92 (1992)

    Article  CAS  Google Scholar 

  8. S. Amirhaghi, V. Craciun, F. Beech, M. Vickers, S. Tarling, P. Barnes and I.W. Boyd, Mat. Res. Soc. Symp. Proc. 285 489 (1993)

    Article  CAS  Google Scholar 

  9. V. Craciun, J. Elders, J.G.E. Gardeniers and I.W. Boyd, Appl. Phys. Lett. 65, (1994)

  10. F.A. Smidt Int. Mat. Rev. 35, 61 (1990)

    Article  CAS  Google Scholar 

  11. J.K. Hirvonen, Mat. Sci. Rep. 6, 215 (1991)

    Article  CAS  Google Scholar 

  12. W.-K. Chu, J.W. Mayer and M.-A. Nicolet, Backscattering Spectrometry, (1978) Academic Press, London

    Book  Google Scholar 

  13. available from Computer Graphics Services, Ithaca, NY

  14. K. Kushida and H. Takeuchi, J. Appl. Phys. 56 1133 (1984)

    Article  CAS  Google Scholar 

  15. P.J. Martin, W.G. Sainty, and R.P. Netterfield, Vacuum 35, 621 (1985)

    Article  CAS  Google Scholar 

  16. J. Hu and R.G. Gordon, Solar Cells 30, 437 (1991)

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Naval Research Laboratory, Code 6672, Surface Modification Branch, 4555 Overlook Ave SW, Washington, D.C., 20375-5345, USA

    E.P. Donovan, J.S. Horwitz, C.A. Carosella & D.B. Chrisey

  2. Sachs Freeman Associates, 1401 McCormick Dr., Landover, MD, 20785, USA

    R.C.Y. Auyeung

  3. Department of Electrical Engineering, Boston University, 44 Cumming St., Boston, MA, 02215, USA

    J.G. Smits

Authors
  1. E.P. Donovan
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J.S. Horwitz
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. C.A. Carosella
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. R.C.Y. Auyeung
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. D.B. Chrisey
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. J.G. Smits
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Donovan, E., Horwitz, J., Carosella, C. et al. Pulsed Laser Deposition of ZnO Thin Films for Piezoelectric Applications. MRS Online Proceedings Library 360, 395–400 (1994). https://doi.org/10.1557/PROC-360-395

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/PROC-360-395

Search

Navigation