Thermo-Mechanical Ni50Ti50/Si Composite Thin Film Switch

Abstract

The mechanical properties of Ni50Ti50 deposited on Si and 3C-SiC substrates were studied focussing on the interaction of the film and substrate. This interaction determines the transformation characteristics through interface accommodation and mechanical constraints exerted by the substrate stiffness. Substrate stiffness, controlled by the film/substrate thickness ratio, was found to have a substantial influence on the output energy of the film/substrate composite. A switch type composite based on this knowledge was fabricated and tested.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    S. Miyazaki, Y. Sugaya, and K. Otsuka, MRS Int’l Mtg. on Adv. Mats., vol. 9 p. 251 (1989) J.D. Busch, A.D. Johnson, D.E. Hodgson, C.H. Lee and D.A. Stevenson, Mat. Sci. Forum, vol.56-58 p. 729 (1990)

    Google Scholar 

  2. 2.

    A.P. Jardine, MRS Symp. Proc. vol. 246 p. 427 (1992)

    CAS  Article  Google Scholar 

  3. 3.

    A.D. Johnson, J. Micromech. Microeng., vol.1, p. 39 (1991)

    Article  Google Scholar 

  4. 4.

    J.A. Walker and K.J. Gabriel, Sensors and Actuators, A21-A23 p. 243 (1990)

    Article  Google Scholar 

  5. 5.

    C. M. Su and M. Wuttig, in “Damping in Multiphase Inorganic Materials” edited by R. B. Baghat, ASM International Publication, 1993, p. 165 S. Z. Hua, C. M. Su and M. Wuttig, MRS Proceeding on Thin Films-Stress and Mechanical Properties III, Vol. 308, p. 525 (1993)

  6. 6.

    reference for - structural constraint, systematically studied previously

  7. 7.

    J. A. Dillon Jr. in Silicon Carbide -A High Temperature Semiconductor, Edited by J. R. O’Connor and J. Smiltens, Pergamon Press, 1960, p. 235.

  8. 8.

    G. G. Stoney, Proc. Roy. Soc. London A82, p. 172 (1909)

    Google Scholar 

  9. 9.

    De Hartog, Mechanical Vibrations, McGraw-Hill, New York, 1947

    Google Scholar 

  10. 10.

    Quanmin Su, S. Z. Hua and M. Wuttig, Proceedings of the International Conference on Martensitic Transformations, MRS-ICAM-93, Tokyo, 1993

    Google Scholar 

  11. 11.

    reference for the volume shrinks about 0.5%

  12. 12.

    A. Brenner and S. Senderoff, NBS Report 195442, 1 (1949)

    Google Scholar 

  13. 13.

    Mary F. Doerner and William D. Nix, Critical Reviews in Solid State and Materials Sciences, vol. 14, Issue 3, 1988, pp 225–268

    CAS  Article  Google Scholar 

  14. 14.

    Williams, J. Thermal Stresses, 8, 183 (1985)

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Kim, T., Su, Q. & Wuttig, M. Thermo-Mechanical Ni50Ti50/Si Composite Thin Film Switch. MRS Online Proceedings Library 360, 375–380 (1994). https://doi.org/10.1557/PROC-360-375

Download citation