Abstract
Sputter deposition of TiNi has been problematic due to the extreme reactivity of titanium. There are several advantages in depositing TiNi with other metals, such as Ti and Cu, as the Shape Memory Effect properties can be changed selectively, including coring of the thin film. Simultaneous co-deposition of cored material using sputter deposition becomes technically difficult as this implies that the sample to target distance increases. In this paper, we discuss a relationship developed so that a basic base vacuum pressure can be found with target-sample distance and correlated with the observed phases for both Ti and TiNi samples. Practical limitations imposed by the vacuum system on both devices and device quality are discussed
Similar content being viewed by others
References
J. Busch, A.D. Johnson, C.H. Lee and D.A. Stevenson, “Shape Memory Properties of Ni-Ti Sputter-deposited Film”, J.Appl.Phys., 68:6224–6228 (1990)
A.P.Jardine and L.D.Wasielesky, ‘Development of Thin Film Shape Memory Effect Nickel Titanium as Micron Sized Shape Memory Effect Actuators, Proc. M.R.S. Symp., 187:181-186 (1990).
K. Ikuta, H. Fujita, M. Ikeda and S. Yamashita, “Crystallographic Analysis of TiNi Shape Memory Alloy for Micro Actuator”, IEEE Micro Electro Mechanical Systems, 90CH2832-4:38–39(1990)
J.A. Walker, K.J. Gabriel and M. Mehregany, “Thin-film Processing of TiNi Shape Memory Alloy”, Sensors andActuators A21:243–246 (1990)
S. Miyazaki and A. Ishida, Material Transactions, JIM, 35, p. 14–10 (1994)
B.Walles, L.Chang and D.S.Grummon, “Residual Stress, Adhesion and Crystallization of Ion-Sputtered and IBED processed NiTi Films”, Proc. MRS Symp.246:349-354 (1991)
A.P. Jardine, “Cycling Times of Thin-Film NiTi of Si”, MRS Symp. Proc., “Shape Memory Materials and Phenomenon”, 246:427-431 (1991)
A.D. Johnson, “Vacuum deposited TiNi Shape Memory film: Characterization and Applications in Microdevices”, J. Micromech. Microeng., 1:34–41 (1991)
K.N. Melton, “Ti-Ni Based Shape Memory Alloys”, Engineering Aspects of Shape Memory Alloys, Butterworth-Heinemann Ltd, London, p21 (1990)
A.P. Jardine, submitted, J.Vac.Sci.Tech. A (1994)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Peter Jardine, A. Deposition Parameters for Sputter-Deposited Thin Film TiNi. MRS Online Proceedings Library 360, 293–298 (1994). https://doi.org/10.1557/PROC-360-293
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-360-293