Fragmentation of C60 Molecules in Partially Ionized Fullerene Beam Deposition


C60 films have been deposited using a partially ionized cluster beam deposition (PIBD) technique. The experimental results show that as Va exceeds about 400 V almost all the C60 molecules fragmentate at collision with the substrate and the obtained films turn to be amorphous carbon layers at elevated Va indicated by measurements of Raman spectra, X-ray diffraction, and ellipsometry.

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Correspondence to Ren Zhong-Minren.

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Zhong-Minren, R., Xia-Xingxiong, X., Yuan-Chengdu, D. et al. Fragmentation of C60 Molecules in Partially Ionized Fullerene Beam Deposition. MRS Online Proceedings Library 359, 429–432 (1994).

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