Surface Structure of Tetrahedral-Coordinated Amorphous Diamond-Like Carbon Films Grown by Pulsed Laser Deposition


The structure and composition of tetrahedral-coordinated amorphous diamondlike carbon films (a-tC) grown by pulsed laser deposition (PLD) of graphite has been studied with atomic force microscopy (AFM). The nanometer-scale surface structure has been studied as a function of growth parameters (e.g., laser energy density and film thickness) using contact-mode and tapping-mode AFM. Although the surfaces were found to be generally smooth, they exhibited reproducible structural features on several size scales which correlate with the variation of laser energy and the effects of excited ion etching.

This is a preview of subscription content, access via your institution.

We’re sorry, something doesn't seem to be working properly.

Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.


  1. 1.

    M. P. Siegal, T. A. Friedmann, S. R. Kurtz, D. R. Tallant, R. L. Simpson, F. Dominguez and K. F. McCarty, in Mater. Res. Soc. Proc. (Materials Research Society, San Francisco, 1994), pp.507.

    Google Scholar 

  2. 2.

    G. S. Sandhu and W. K. Chu, Appl. Phys. Lett.55, 437 (1989).

    CAS  Article  Google Scholar 

  3. 3.

    Carl. B. Collins and Farzin Davanloo, in Pulsed Laser Deposition of Thin Films D. B. Chrisey, G. K. Hubler, Eds. (John Wiley and Sons, Inc., New York, 1994), pp.417.

  4. 4.

    R. R. Goforth and P. Hammerling, J. Appl. Phys.47, 3918 (1976).

    CAS  Article  Google Scholar 

  5. 5.

    M. K. Matzen and J. S. Pearlman, Phys. Fluid 22, 449 (1979).

    CAS  Article  Google Scholar 

  6. 6.

    J. Puell, Z. Nat. Forsch.A25, 1807 (1970).

    Google Scholar 

  7. 7.

    J. Stevefelt and C. B. Collins, J. Phys. D: Appl. Phys.24, 2149 (1991).

    CAS  Article  Google Scholar 

  8. 8.

    Ichiro Watanabe, Katsuhiko Hurata and Yoshikazu Shimamura, Jpn. J. Appl. Phys.33, 2035 (1994).

    CAS  Article  Google Scholar 

Download references

Author information



Corresponding author

Correspondence to T. W. Mercer.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Mercer, T.W., DiNardo, N.J., Martinez-Miranda, L.J. et al. Surface Structure of Tetrahedral-Coordinated Amorphous Diamond-Like Carbon Films Grown by Pulsed Laser Deposition. MRS Online Proceedings Library 358, 863 (1994).

Download citation