We performed an X-ray diffraction study of amorphous-tetrahedrally-coordinated carbon (a-tC) films prepared by pulsed laser deposition (PLD). The samples’ properties were analyzed as a function of laser energy and thickness. For all thicknesses and laser energies, films were made up of clusters with a basic unit size of 7 -11 nm. Thicker films, as well as films prepared at higher laser densities exhibit larger clusters, in the tens of nanometers. The clusters are not readily observable by AFM, which may indicate the presence of a flat (graphitized) top film surface.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
M. P. Siegal et al, MRS Spring Meeting, 1994; T. A. Friedmann et al., MRS Spring Meeting, 1994.
J. J. Cuomo et al, J. Vac. Sci. Technol., A10, 3414 (1992); F. Li and J. S. Cannin, Phys. Rev. Lett., 65, 1905 (1990).
O. Glatter and O. Kratky, eds., Small Angle X-Ray Scattering: London, Academic Press, 1982.
R. Itri and L. Q. Amaral, J. Phys. Chem. 95, 423 (1991).
J. Marignan, P. Basserau and P. Delord, J. Phys. Chem. 90, 645 (1986).
O. Glatter, J. Appl. Cryst. 13, 577 (1980).
J. P. André, J. N. Patillon, C. Schiller, J. Y. Lesiourd, O. Vlaeminck and N. Malhouroux, J. Cryst. Growth 109, 292 (1991).
M. G. Bawendi, A. R. Kortan, M. L. Steigerwald and L. E. Brus, J. Chem. Phys. 91, 7282 (1989).
Ohshima Ken-ichi, Shigeki Yatsuya and Jimpei Harada, J. Phys. Soc. Jap. 50, 3071 (1981).
L. J. Martínez-Miranda, G. M. Chow and A. S. Edelstein, to appear in Phys. Rev. B15.
D. G. LeGrand, “Small Angle X-ray Scattering and Neutron Scattering”, Metals Handbook, Vol. 10: Materials Characterization, Amer. Soc. for Metals, Metals Park, OH, 1986; page 402, and references therein.
T. W. Mercer, et al, MRS Fall meeting, 1994.
D. A. Drabold, et al, Phys. Rev: B1, 49, 16 415 (1994).
About this article
Cite this article
Martínez-Miranda, L.J., Friedmann, T.A., Sullivan, J.P. et al. X-Ray Diffraction Study of Clusters in a-tC Films. MRS Online Proceedings Library 358, 857 (1994). https://doi.org/10.1557/PROC-358-857