X-Ray Diffraction Study of Clusters in a-tC Films

Abstract

We performed an X-ray diffraction study of amorphous-tetrahedrally-coordinated carbon (a-tC) films prepared by pulsed laser deposition (PLD). The samples’ properties were analyzed as a function of laser energy and thickness. For all thicknesses and laser energies, films were made up of clusters with a basic unit size of 7 -11 nm. Thicker films, as well as films prepared at higher laser densities exhibit larger clusters, in the tens of nanometers. The clusters are not readily observable by AFM, which may indicate the presence of a flat (graphitized) top film surface.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    M. P. Siegal et al, MRS Spring Meeting, 1994; T. A. Friedmann et al., MRS Spring Meeting, 1994.

    Google Scholar 

  2. 2.

    J. J. Cuomo et al, J. Vac. Sci. Technol., A10, 3414 (1992); F. Li and J. S. Cannin, Phys. Rev. Lett., 65, 1905 (1990).

    CAS  Article  Google Scholar 

  3. 3.

    O. Glatter and O. Kratky, eds., Small Angle X-Ray Scattering: London, Academic Press, 1982.

    Google Scholar 

  4. 4.

    R. Itri and L. Q. Amaral, J. Phys. Chem. 95, 423 (1991).

    CAS  Article  Google Scholar 

  5. 5.

    J. Marignan, P. Basserau and P. Delord, J. Phys. Chem. 90, 645 (1986).

    CAS  Article  Google Scholar 

  6. 6.

    O. Glatter, J. Appl. Cryst. 13, 577 (1980).

    Article  Google Scholar 

  7. 7.

    J. P. André, J. N. Patillon, C. Schiller, J. Y. Lesiourd, O. Vlaeminck and N. Malhouroux, J. Cryst. Growth 109, 292 (1991).

    Article  Google Scholar 

  8. 8.

    M. G. Bawendi, A. R. Kortan, M. L. Steigerwald and L. E. Brus, J. Chem. Phys. 91, 7282 (1989).

    CAS  Article  Google Scholar 

  9. 9.

    Ohshima Ken-ichi, Shigeki Yatsuya and Jimpei Harada, J. Phys. Soc. Jap. 50, 3071 (1981).

    Article  Google Scholar 

  10. 10.

    L. J. Martínez-Miranda, G. M. Chow and A. S. Edelstein, to appear in Phys. Rev. B15.

  11. 11.

    D. G. LeGrand, “Small Angle X-ray Scattering and Neutron Scattering”, Metals Handbook, Vol. 10: Materials Characterization, Amer. Soc. for Metals, Metals Park, OH, 1986; page 402, and references therein.

  12. 12.

    T. W. Mercer, et al, MRS Fall meeting, 1994.

  13. 13.

    D. A. Drabold, et al, Phys. Rev: B1, 49, 16 415 (1994).

    Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to L. J. Martínez-Miranda.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Martínez-Miranda, L.J., Friedmann, T.A., Sullivan, J.P. et al. X-Ray Diffraction Study of Clusters in a-tC Films. MRS Online Proceedings Library 358, 857 (1994). https://doi.org/10.1557/PROC-358-857

Download citation