Finite element simulation of the nanoindentation process has been carried out to investigate the nanomechanical response of materials and thin film systems. The influence of the geometry of the indenter, friction between the indenter and the surface, and pre-stress in the film, on the nanomechanical response have all been investigated. The effect of pile-up on the contact area calculation and the problems which occur with the commonly used methods in calculating the contact area have been studied. Results shows considerable error in calculating the contact area which depends on the indentation conditions used for the simulation. Simulation results suggest, that the influence of residual stress on hardness response is material sensitive.
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Syed Asif, S.A., Derby, B. & Roberts, S.G. Nanomechanical Response of Materials and Thin Film Systems: Finite Element Simulation. MRS Online Proceedings Library 356, 681–686 (1994). https://doi.org/10.1557/PROC-356-681