The orientational dependence of stress and strain was measured for (111) and (110) oriented grains in an Al thin film which hillocked upon heating, and (111) and (100) oriented grains in Cu thin films, one of which exhibits abnormal (100) grain growth. Results from the Al thin film were inconclusive in the evaluation of the Sanchez model for hillocking, however they indicate that the Nix model for the orientational dependence of yield stress is not applicable to individual grains at room temperature. Results from the Cu thin films suggest that suppression of (100) abnormal grain growth is due to isostress averaging among the grains of varying orientation.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
J.E. Sanchez Jr. and E. Arzt, Script. Met. et Mat., 27, 285 (1992).
W.D. Nix, Met. Trans. A, 20A, 2217 (1989).
P.R. Besser, J. John E. Sanchez, S. Brennan, J.C. Bravman, G. Takaoka and I. Yamada, Mat. Res. Soc. Symp. Proc, 343, 659 (1994).
C.V. Thompson, Annu. Rev. Mater. Sci., 20, 245 (1990).
C.V. Thompson, Script. Met. et Mat., 28, 167 (1993).
E.M. Zielinski, R.P. Vinci and J.C. Bravman, J. Appl. Phys., 76, 4516 (1994).
B.M. Clemens and J.A. Bain, MRS Bulletin, 17, 46 (1992).
D.B. Knorr, Mat. Res. Soc. Symp. Proc, 309, 75 (1993).
R.P. Vinci, E.M. Zielinski and J.C. Bravman, Thin Sol. Films, in press (1994).
Landolt-Börnstein. Numerical Data and Functional Relationships in Science and Technology. (Springer-Verlag, Berlin, 1969).
R. Venkatraman and J.C. Bravman, J. Mater. Res., 7, 2040 (1992).
C.V. Thompson, J. Mater. Res., 8, 237 (1993).
M. Murakami, Mat. Res. Soc. Symp. Proc, 130, 269 (1989).
About this article
Cite this article
Zielinski, E.M., Vinci, R.P. & Bravman, J.C. Measurement of the Dependence of Stress and Strain on Crystallographic Orientation in Cu and Al thin Films. MRS Online Proceedings Library 356, 429–434 (1994). https://doi.org/10.1557/PROC-356-429