Elastic Constant Effect on the Critical Thickness of an Epilayer


The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.

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  1. 1.

    F.C. Frank and van der Merwe J.H., Proc. Roy. Soc., A198, 205 (1949); Ibid., A198, 216 (1949); Ibid., A200, 125 (1949).

    Google Scholar 

  2. 2.

    J.W. Matthews and A.E. Blakeslee, J. Cryst. Growth, 27, 118 (1974).

    CAS  Google Scholar 

  3. 3.

    L.B. Freund, Advances in Applied Mechanics, 30, 1 (1993).

    CAS  Article  Google Scholar 

  4. 4.

    J.R. Willis, S.C. Jain and R. Bullough, Phil. Mag. A, 62, 115 (1990); Ibid., 64, 629 (1991).

    Article  Google Scholar 

  5. 5.

    S.C. Jain, T.J. Gosling, J.R. Willis, D.H.J. Totterdell, and R. Bullough, Phil. Mag. A, 65, 1151 (1992).

    Article  Google Scholar 

  6. 6.

    T.J. Gosling, S.C. Jain, J.R. Willis, A. Atkinson, and R. Bullough, Phil. Mag. A, 66, 119 (1992).

    CAS  Article  Google Scholar 

  7. 7.

    T.Y. Zhang, J.E. Hack and L.J. Guido, J. Appl. Phys., 75, 2358 (1994); Ibid, 75, 2363 (1994).

    CAS  Article  Google Scholar 

  8. 8.

    B.W. Dodson, Appl. Phys. Lett., 51, 37 (1988).

    Article  Google Scholar 

  9. 9.

    T.J. Gosling and J.R. Willis, Phil. Mag. A, 69, 65 (1994).

    Article  Google Scholar 

  10. 10.

    T.Y. Zhang and J.C.M. Li, J. Appl. Phys., 70, 744 (1991); Ibid., 72, 2215 (1992).

    Article  Google Scholar 

  11. 11.

    J.P. Hirth and J. Lothe, Theory of Dislocations, second edition, John Wiley & Son, New York (1982).

    Google Scholar 

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Correspondence to Zhang-Yi Tong.

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Tong, ZY. Elastic Constant Effect on the Critical Thickness of an Epilayer. MRS Online Proceedings Library 356, 325–330 (1994). https://doi.org/10.1557/PROC-356-325

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