Abstract
The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
F.C. Frank and van der Merwe J.H., Proc. Roy. Soc., A198, 205 (1949); Ibid., A198, 216 (1949); Ibid., A200, 125 (1949).
J.W. Matthews and A.E. Blakeslee, J. Cryst. Growth, 27, 118 (1974).
L.B. Freund, Advances in Applied Mechanics, 30, 1 (1993).
J.R. Willis, S.C. Jain and R. Bullough, Phil. Mag. A, 62, 115 (1990); Ibid., 64, 629 (1991).
S.C. Jain, T.J. Gosling, J.R. Willis, D.H.J. Totterdell, and R. Bullough, Phil. Mag. A, 65, 1151 (1992).
T.J. Gosling, S.C. Jain, J.R. Willis, A. Atkinson, and R. Bullough, Phil. Mag. A, 66, 119 (1992).
T.Y. Zhang, J.E. Hack and L.J. Guido, J. Appl. Phys., 75, 2358 (1994); Ibid, 75, 2363 (1994).
B.W. Dodson, Appl. Phys. Lett., 51, 37 (1988).
T.J. Gosling and J.R. Willis, Phil. Mag. A, 69, 65 (1994).
T.Y. Zhang and J.C.M. Li, J. Appl. Phys., 70, 744 (1991); Ibid., 72, 2215 (1992).
J.P. Hirth and J. Lothe, Theory of Dislocations, second edition, John Wiley & Son, New York (1982).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Tong, ZY. Elastic Constant Effect on the Critical Thickness of an Epilayer. MRS Online Proceedings Library 356, 325–330 (1994). https://doi.org/10.1557/PROC-356-325
Published:
Issue Date:
DOI: https://doi.org/10.1557/PROC-356-325