Microstructure and Surface Morphology of Ag and Au Films Grown on Hydrogen-Terminated Si(111) Substrates


Reflection high energy electron diffraction (RHEED) and x-ray diffraction (XRD) studies on Ag and Au films grown on hydrogen terminated Si(111) substrates at room temperature indicate a <111> oriented growth. Atomic force microscopy (AFM) data reveal a smooth surface morphology for both Ag and Au films after annealing at 275°C and 175°C for 1 hour, as compared to films without annealing. High resolution transmission electron microscopy (HREM) was employed to examine the annealed samples. HREM studies show a highly uniform film with abrupt interface for Ag/Si(111). On the other hand, Au/Si(111) shows several twin formations both at the interface and in the bulk of the film.

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Naik, R., Auner, G.W., Gebremariam, S. et al. Microstructure and Surface Morphology of Ag and Au Films Grown on Hydrogen-Terminated Si(111) Substrates. MRS Online Proceedings Library 355, 613–618 (1994). https://doi.org/10.1557/PROC-355-613

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