Microstructure and Surface Morphology of Ag and Au Films Grown on Hydrogen-Terminated Si(111) Substrates

Abstract

Reflection high energy electron diffraction (RHEED) and x-ray diffraction (XRD) studies on Ag and Au films grown on hydrogen terminated Si(111) substrates at room temperature indicate a <111> oriented growth. Atomic force microscopy (AFM) data reveal a smooth surface morphology for both Ag and Au films after annealing at 275°C and 175°C for 1 hour, as compared to films without annealing. High resolution transmission electron microscopy (HREM) was employed to examine the annealed samples. HREM studies show a highly uniform film with abrupt interface for Ag/Si(111). On the other hand, Au/Si(111) shows several twin formations both at the interface and in the bulk of the film.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    G. S. Higashi, R. S. Becker, Y. J. Chabal, and A. J. Becker, Appl. Phys. Lett. 58, 1656 (1991).

    CAS  Article  Google Scholar 

  2. 2.

    J. Terry, R. Cao, C. Wigren, and P. Pianetta, J. Vac. Sci. Tech. A 12, 1869 (1994).

    CAS  Article  Google Scholar 

  3. 3.

    Y. T. Chang, Y. L. Chen, M. M. Karmarker, and W. J. Meng, Appl. Phys. Lett. 59, 953 (1991).

    Article  Google Scholar 

  4. 4.

    C.-C Cho, and H.-Y Liu, Mater. Res. Soc. Proc. 221, 87 (1991).

    CAS  Article  Google Scholar 

  5. 5.

    P. Xu, P. Miller, and J. Silcox, Mater. Res. Soc. Proc. 202, 19 (1991).

    CAS  Article  Google Scholar 

  6. 6.

    B. G. Demczyk, R. Naik, G. Auner, C. Kota, and U. Rao, J. Appl. Phys. 75, 1956 (1994).

    CAS  Article  Google Scholar 

  7. 7.

    R. Naik, C. Kota, B. U. M Rao, and G. W. Auner, J. Vac. Sci. Tech. A 12, 1832 (1994).

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to R. Naik.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Naik, R., Auner, G.W., Gebremariam, S. et al. Microstructure and Surface Morphology of Ag and Au Films Grown on Hydrogen-Terminated Si(111) Substrates. MRS Online Proceedings Library 355, 613–618 (1994). https://doi.org/10.1557/PROC-355-613

Download citation