1X Thin Films Prepared By Mass Separated Ion Beam Deposition


We have studied the growth and the properties of CN films prepared by deposition of mass separated 12C+ and 14N+ ions. The film thickness and density were determined as a function of ion energy between 20 eV and 500 eV and for substrate temperatures of 20 °C and 350 °C. Sputtering effects limit the maximum N concentration to about 30 - 40 at.% even for ion energies as low as 20 eV. IR absorption measurements indicate predominantly C-N and C=N bonding and an amorphous or strongly disordered CN-network. For room temperature deposited CN films with N concentrations up to 25 at.% I-V curves of metal-CN-metal devices show Frenkel-Poole behavior due to field-enhanced thermal activation of localized electrons. Films deposited at 350 °C have N concentrations below 15 at.% and graphitic properties like low resistivity and a density close to graphite.

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  1. 1.

    R.H. Wentorf Jr., J. Chem. Phys. 26, 956 (1957)

    CAS  Article  Google Scholar 

  2. 2.

    J. Grenville-Wells, The New Scientist 28, 16 (1957)

    Google Scholar 

  3. 3.

    J.J. Pouch, S.A. Alterovitz (eds.), Synthesis and Properties of Boron Nitride. Mat. Sei. For. 54&55 (1990)

  4. 4.

    A.Y. Liu and M.L. Cohen, Science 245, 841 (1994)

    Article  Google Scholar 

  5. 5.

    A.Y. Liu and M.L. Cohen, Phys. Rev. B41, 10727 (1990)

    Article  Google Scholar 

  6. 6.

    W. Schnick, Angew. Chem. 105, 1649 (1993)

    CAS  Google Scholar 

  7. 7.

    J.F.D. Chubaci, T. Sakai, T. Yamamoto, K. Ogata, A. Ebe and F. Fujimoto, Nucl. Instr. Meth. B80/81, 463 (1993)

    Article  Google Scholar 

  8. 8.

    A. Bousetta, M. Lu, A. Bensaoula and A. Schultz, Appl. Phys. Lett. 65, 696 (1994)

    CAS  Article  Google Scholar 

  9. 9.

    J. Narayan, J. Reddy, N. Biunno, S.M. Kanetkar, P. Tiwari and N. Parikh, Mat. Sci. Eng. B26, 49 (1994)

    Article  Google Scholar 

  10. 10.

    C. Niu, Y.Z. Lu and C.M. Lieber, Science 261, 334 (1993)

    CAS  Article  Google Scholar 

  11. 11.

    D. Li, Y.W. Chung, M.S. Wong and W.D. Sproul, J. Appl. Phys. 74, 219 (1993)

    CAS  Article  Google Scholar 

  12. 12.

    N. Nakayama, Y. Tsuchiya, S. Tamada, K. Kosuge, S. Nagata, K. Takahiro and S. Yamaguchi, Jpn. J. Appl. Phys. 32, L1465 (1993)

    Article  Google Scholar 

  13. 13.

    K.M. Yu, M.L. Cohen, E.E. Haller, W.L. Hansen, A.Y. Liu and I.C. Wu, Phys. Rev. B49, 5034(1994)

    Article  Google Scholar 

  14. 14.

    S. Kumar and T.L. Tansley, J. Appl. Phys. 76, 4390(1994)

    CAS  Article  Google Scholar 

  15. 15.

    A. Hoffman, I. Gouzman and R. Brener, Appl. Phys. Lett. 64, 845 (1994)

    CAS  Article  Google Scholar 

  16. 16.

    J. Kouvetakis, A. Bandari, M. Todd and B. Wilkens, Chem. Mater. 6, 811 (1994)

    CAS  Article  Google Scholar 

  17. 17.

    C.M. Lieber and Z.J. Zhang, Adv. Mater. 6, 497 (1994)

    CAS  Article  Google Scholar 

  18. 18.

    D. Marton, K.J. Boyd, A.H. Al-Bayati, S.S. Todorov and J.W. Rabalais, Phys. Rev. Lett. 73, 118 (1994)

    CAS  Article  Google Scholar 

  19. 19.

    H. Hofsäss, H. Binder, T. Klumpp and E. Recknagel, Diamond & Relat. Mater. 3, 137 (1994).

    Article  Google Scholar 

  20. 20.

    H.C. Hofsäss, J. Biegel, C. Ronning, R.G. Downing, and G.P. Lamaze, Mat. Res. Soc. Symp. Proc. Vol.316, 881 (1994)

    Article  Google Scholar 

  21. 21.

    H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke and M. Kuhr, submitted to Appl. Phys. Lett.

  22. 22.

    C. Ronning, U. Griesmeier, M. Gross and H.C. Hofsäss, presented at Diamond Films ‘94, JJ Ciocco, Italy, to be published in Diamond & Relat. Mater.

  23. 23.

    L.C. Feldman and J.W. Mayer. Fundamentals of Surface and Thin Film Analysis. (North Holland, New York, 1986) pp. 69–97

    Google Scholar 

  24. 24.

    L. Maya, J. Polymer Sci. A: Polymer Chemistry 31, 2595 (1993)

    CAS  Google Scholar 

  25. 25.

    T.K. Trout, J.M. Bellama, F.E. Brinckman, R.A. Faltynek, J. Mater. Res. 4, 399 (1989)

    CAS  Article  Google Scholar 

  26. 26.

    G.A.J. Amaratunga, D.E. Segel and D.R. McKenzie, Appl. Phys. Lett. 59, 69 (1991)

    CAS  Article  Google Scholar 

  27. 27.

    J.L. Corkill, M.L. Cohen, Phys. Rev. B48, 17622 (1993)

    Article  Google Scholar 

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Hofsäss, H.C., Ronntng, C., Griesmeier, U. et al. 1X Thin Films Prepared By Mass Separated Ion Beam Deposition. MRS Online Proceedings Library 354, 93–98 (1994). https://doi.org/10.1557/PROC-354-93

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