Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition


Severe excimer laser irradiation is reported to impart electrical conductivity to Kapton* polymide films. We find that a proper choice of pretreatment and irradiation practice reduces the required dose markedly. Such films have sufficient conductivity to permit direct, good-quality, adherent copper electroplating.

This is a preview of subscription content, access via your institution.


  1. 1.

    H.M. Phillips, D.L. Callahan, R. Sauerbrey, G. Szabo and Z.Bor; Appl.Phys.Lett. 58, 2761 (1991).

    CAS  Article  Google Scholar 

  2. 2.

    J.I. Gittleman and E.K. Sichel; J.Electron.Mat. 10, 527 (1981).

    Article  Google Scholar 

  3. 3.

    J. Davenas; Appl.Surf.Sci. 36, 539 (1989).

    Article  Google Scholar 

  4. 4.

    E. Sutcliffe and R. Srinivasan; J.Appl.Phys. 60, 3325 (1986).

    Article  Google Scholar 

  5. 5.

    M. Schumann, R. Sauerbrey and M.C. Smayling; Appl.Phys.Lett. 58, 428 (1991).

    CAS  Article  Google Scholar 

  6. 6.

    H.M. Phillips, D.L. Callahan, S.P. Le Blanc, Z. Bali and R. Sauerbrey; Mat.Res.Soc.Proc. 285, 169 (1993).

    CAS  Article  Google Scholar 

  7. 7.

    H.M. Phillips, T. Feurer, D.L. Callahan and R. Sauerbrey; Mat.Res. Soc.Proc. 285, 175 (1993).

    CAS  Article  Google Scholar 

  8. 8.

    T. Feurer, R. Sauerbrey, M.C. Smayling and B.J. Story; Appl.Phys.A 56, 275 (1993).

    Article  Google Scholar 

  9. 9.

    E. Arenholz, J. Heitz, M. Wagner, D. Baäerle, H. Hilbst and A. Hagemeyer; Appl.Surf.Sci. 69, 16 (1993).

    CAS  Article  Google Scholar 

  10. 10.

    R. Srinivasan, R.R. Hall and D.C. Albee; Appl.Phys.Lett. 63, 3382 (1993).

    CAS  Article  Google Scholar 

  11. 11.

    F. Kokai, H. Saito and T. Fujioka; J.Appl.Phys. 66, 3252 (1989).

    CAS  Article  Google Scholar 

Download references

Author information



Corresponding author

Correspondence to James L. Hohman.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Hohman, J.L., Keating, K.B. & Kelley, M.J. Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition. MRS Online Proceedings Library 354, 571–577 (1994).

Download citation