Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition

Abstract

Severe excimer laser irradiation is reported to impart electrical conductivity to Kapton* polymide films. We find that a proper choice of pretreatment and irradiation practice reduces the required dose markedly. Such films have sufficient conductivity to permit direct, good-quality, adherent copper electroplating.

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Correspondence to James L. Hohman.

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Hohman, J.L., Keating, K.B. & Kelley, M.J. Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition. MRS Online Proceedings Library 354, 571–577 (1994). https://doi.org/10.1557/PROC-354-571

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