Structural Differences Between Cvd And Thermally Grown Amorphous SiO2


The structure and density of amorphous S1O2 films grown by chemical vapor deposition (CVD) or thermal oxidation are studied by Fourier-transform infrared (FT-IR) absorption, neutron diffraction, and Rutherford backscattering (RBS) measurements. CVD oxides, formed in an atmospheric-pressure CVD reactor with a SiH4-O2 gas mixture at 400 °C, are compared with thermal oxides, grown at 980 °C in H2-O2 atmosphere. The average Si-O-Si bond angle deduced from the stretching frequency of FT-IR is found to be smaller in CVD oxides than in thermal oxides, and the density revealed by RBS measurements is found to be a little lower in CVD oxides than in thermal oxides. These differences are explained by the medium-range structural disorder revealed by FT-IR measurements as well as by neutron diffraction measurements. The medium-range structural disorder in CVD oxides is responsible for large silanol content in the oxides and is the origin in difference between CVD and thermal oxides.

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Correspondence to M. Makabe.

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Makabe, M., Hirose, K., Ishikawa, H. et al. Structural Differences Between Cvd And Thermally Grown Amorphous SiO2. MRS Online Proceedings Library 354, 455–460 (1994).

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