Effects of Implantation Temperature on the Structure, Composition and Oxidation Resistance of Sic


ɑ-SiC crystals were implanted with aluminum to a high dose at room temperature or 800°C. Studies by transmission electron microscopy showed that SiC was amorphized by room temperature implantation but remained crystalline at 800°C. Crystalline aluminum carbide was formed and aluminum redistribution took place in SiC implanted at 800°C. Implanted and unimplanted crystals were oxidized in 1 atm flowing oxygen at 1300°C. Amorphization led to accelerated oxidation of SiC. The oxidation resistance of SiC implanted at 800°C was comparable to that of pure SiC. The oxidation layers formed on SiC implanted at both temperatures consisted of silica embedded with mullite precipitates. The phase formation during implantation and oxidation is consistent with thermodynamic predictions.

This is a preview of subscription content, access via your institution.


  1. 1

    Z. Yang, H. Du, M. Libera, S.P. Withrow, L.M. Casas, and R.T. Lareau, Covalent Ceramics II: NonOxides, edited by A.R. Barron, G.S. Fischman, M.A. Fury, and A.F. Hepp (MRS Symp. Proa, Boston, MA, November, 1993, Materials Research Society, Pittsburgh, PA, 1994), p. 281.

  2. 2

    C.S. Yust and C.J. McHargue, J. Am. Ceram. Soc. 67,117 (1984).

    Article  Google Scholar 

  3. 3

    P.J. Burnett and T.F. Page, J. Mater. Sei. 19,3524 (1984).

    CAS  Article  Google Scholar 

  4. 4

    T. Hioki, A. Itoh, M. Ohkubo, S. Noda, H. Doi, J. Kawamoto and O. Kamigaito, J. Mater. Sei., 21, 1328 (1986).

    Article  Google Scholar 

  5. 5

    P.J. Burnett and T.F. Page, in Science of Hard Materials, edited by E.A. Almond (Adam Hilger, London, 1986) p. 789.

  6. 6

    P.J. Burnett and T.F. Page, Radiat. Effects, 97,283 (1986).

    CAS  Article  Google Scholar 

  7. 7

    C.J. McHargue, G.C. Farlow, C.W. White, J.M. Williams, B.R. Appleton and H. Naramoto, Mater. Sei. Eng., 69, 123 (1986).

    Article  Google Scholar 

  8. 8

    I.L. Singer and J. H. Wandass, Structure-Property Relationships in Surface-Modified Ceramics. Edited by C. J. McHargue (Kluwer Academic Publishers, 1989) p. 199.

  9. 9

    H. Du, Z. Yang, M. Libera, D. Jacobson, Y. C. Wang and R. F. Davis, J. Amer. Ceram. Soc. 76, 330 (1993).

    CAS  Article  Google Scholar 

  10. 10

    H. Du, Final Report (National Science Foundation, 1994).

    Google Scholar 

  11. 11

    Ion Beam Profile Code, Version 3.20, Implant Science Corp. 1992.

    Google Scholar 

  12. 12

    H.G. Bohn, J.M. Williams, C.J. Mchargue and G.M. Begun, J. Mater. Res. 2, 107 (1987).

    CAS  Article  Google Scholar 

  13. 13

    C.J. McHargue and J.M. Williams, Nuclear Instru. Methods B80/81 889(1993).

    Article  Google Scholar 

  14. 14

    V. Heera, R. Kogler, W. Skorupa and J. Stoemenos, in press.

  15. 15

    JANAF Thermochemical Tables, 2nd Ed. Edited by D.R Stull and H. Prophet et al. (U.S. Dept. of Commerce, National Bureau of Standards, Washington DC, 1970).

    Google Scholar 

  16. 16

    H. Du, M. Libera, Z. Yang, P.J. Lai, D. Jacobson, Y. C. Wang and R. F. Davis, Appl. Phys. Lett. 62, 423 (1993).

    CAS  Article  Google Scholar 

  17. 17

    G. Deamaley, Nuclaer Instruments and Methods, 182, 899 (1981).

    Google Scholar 

Download references

Author information



Corresponding author

Correspondence to Zunde Yang.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Yang, Z., Du, H., Libera, M. et al. Effects of Implantation Temperature on the Structure, Composition and Oxidation Resistance of Sic. MRS Online Proceedings Library 354, 281–286 (1994). https://doi.org/10.1557/PROC-354-281

Download citation