Thin films of BaTiO3 were prepared by the sol-gel route using barium titanium methoxypropoxide in methoxypropanol. Sols with water of hydrolysis varying between h=0 and h=2 were spun onto (100) Si and Ge coated (100) Si substrates. XRD and analytical TEM were used to study the microstructure and crystallization behavior of these films. Polycrystalline BaTiO3 was obtained by heat treating the films at temperatures between 600 and 750°C using either conventional furnace annealing or rapid thermal annealing. Films prepared from sols having the highest water content tended to crystallize first. The BaTiO3 thin films exhibited a fine grain size on the order of 25–50 nm. No preferred orientation was observed. The effects of the hydrolysis conditions of the sol, the type of heat treatment, and the choice of substrate on the final microstructure of the films are discussed.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
D.R. Uhlmann, G. Teowee, J.M. Boulton, S. Motakef, and S.C. Lee, Journal of Non-Crystalline Solids 147 &148, 409 (1992).
Y. Xu and J.D. Mackenzie, Integrated Ferroelectrics 1, 17 (1992).
C.J. Brinker and G.W. Scherer, Sol-Gel Science, Academic Press, San Diego, California, (1990).
N.D.S. Mohallem and M.A. Aegerter in Better Ceramics Through Chemistry III, edited by C.J. Brinker, D.E. Clark, and D.R. Ulrich (Mater. Res. Soc. Proc. 121, Pittsburgh, PA, 1988) pp. 515–518.
J.M. Bell, B. Ben-Nissan, M. Anast, B.O. West, L. Spiccia, J. Cullen, I. Watkins, D. deVilliers, and G. Johnston in Better Ceramics Through Chemistry IV. edited by B.J.J. Zelinski, C.J. Brinker, D.E. Clark, and D.R. Ulrich (Mater. Res. Soc. Proc. 180, Pittsburgh, PA, 1990) pp. 453–456.
K.A. Vorotilov, E.V. Orlova, V.I. Petrovsky, M.I. Yanovskaja, S.A. Ivanov, E.P. Turevskaya, and N. Ya. Turova, Ferroelectrics 123, 261 (1991).
M.N. Kamalasanan, S. Chandra, P.C. Joshi, and A. Mansingh, Appl. Phys. Lett. 59 (27), 3547 (1991).
Z. Xu, H.K. Chae, M.H. Frey, and D.A. Payne in Better Ceramics Through Chemistry V. edited by M.J. Hampden-Smith, W.G. Klemperer, and C.J. Brinker (Mater. Res. Soc. Proc. 271, Pittsburgh, PA, 1992) pp. 339–344.
M. Klee and P.K. Larsen, Ferroelectrics 133, 91 (1992).
E.G. Jacobs, Y.G. Rho, R.F. Pinizzotto, S.R. Summerfelt, and B.E. Gnade in Laser Ablation in Materials Processing: Fundamentals and Applications, edited by B. Braren, J.J. Dubowski, and D.P. Norton (Mater. Res. Soc. Proc. 285, Pittsburgh, PA, 1992) pp. 379–384.
About this article
Cite this article
Gust, M.C., Momoda, L.A. & Mecartney, M.L. Microstructure and Crystallization Behavior of Sol-Gel Prepared BaTiO3 Thin Films. MRS Online Proceedings Library 346, 649–653 (1994). https://doi.org/10.1557/PROC-346-649