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Processing Effects on the Microstructure of Sol-Gel Derived SBN Thin Films

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Abstract

Microstructural changes in sol-gel derived SrxBa1-xNb2O6 (SBN) thin films were monitored as a function of chemical variations in the precursor sol and of processing variations of the thin films. 6000Å Sr0.5Ba0.5Nb2O6 thin films were deposited from different alkoxide based precursors under various hydrolysis conditions. The tetragonal tungsten bronze structure was achieved in films at temperatures on the order of 700°C. Preferential (001) orientation of the tetragonal lattice was found to be very dependent upon the substrate orientation as well as thermal treatment schedule. Transmission electron microscopy (TEM) was used to examine the film microstructure. Orientational effects were verified by TEM as well as a tendency for a porous structure in the alkoxide derived films. Substrate and processing dependent grain size and size distributions were also noted.

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Authors and Affiliations

  1. Hughes Research Laboratories, 3011 Malibu Canyon Rd., Malibu, CA, 90265, USA

    L. A. Momoda

  2. Dept. of Mechanical Engineering, Univ. of Calif., Irvine, USA

    M. C. Gust & M. L. Mecartney

Authors
  1. L. A. Momoda
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  2. M. C. Gust
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  3. M. L. Mecartney
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Momoda, L.A., Gust, M.C. & Mecartney, M.L. Processing Effects on the Microstructure of Sol-Gel Derived SBN Thin Films. MRS Online Proceedings Library 346, 297–302 (1994). https://doi.org/10.1557/PROC-346-297

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  • DOI: https://doi.org/10.1557/PROC-346-297

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