Structural Analysis of Pulsed Laser Deposited FeSi2 Films

Abstract

This study focuses on the characterization of iron suicide grown, for the first time, by pulsed laser deposition on Si(111). Silicide growth was attempted both by deposition of pure Fe followed by annealing, and congruent deposition of Fe and Si from a stoichiometric FeSi2 target. The films formed by deposition of pure Fe and annealing did not grow epitaxially on Si(111) and contained a number of phases including β-FeSi2. Films grown by congruent deposition of Fe and Si did grow epitaxially on Si(111) and contained either pure β-FeSi2 or a mixture of both FeSi and β-FeSi2, depending on deposition conditions. The following epitaxial orientations were observed: β-FeSi2(001)//Si(111), β-FeSi2[010]//Si<110> with three variants, and FeSi(111)//Si(111), FeSi[110]//Si[112]. Films of various thicknesses were analyzed with conventional transmission electron diffraction and microscopy.

This is a preview of subscription content, access via your institution.

We’re sorry, something doesn't seem to be working properly.

Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.

References

  1. 1.

    M.C. Bost and J.E. Mahan, J. Appl. Phys. 58 (7), 2696 (1985).

    CAS  Article  Google Scholar 

  2. 2.

    N.E. Christensen, Phys. Rev. B, 42 (11), 7148 (1990).

    CAS  Article  Google Scholar 

  3. 3.

    J.E. Mahan, K.M. Geib, G.Y. Robinson, R.G. Long, Y. Xinghua, G. Bai, M.-A. Nicolet and M. Nathan, Appl. Phys. Lett. 56 (21), 2126 (1990).

    CAS  Article  Google Scholar 

  4. 4.

    J. Chevrier, V. Le Thanh, S. Nitsche and J. Derrien, Appl. Surf. Sci. 56–58, 438 (1992).

    Article  Google Scholar 

  5. 5.

    H. Moritz, B. Rosen, S. Popovic, A. Rizzi and H. Luth, J. Vac. Sci. Technol. B, 10 (4), 1704 (1992).

    CAS  Article  Google Scholar 

  6. 6.

    D. Gerthsen, K. Rademacher, Ch. Dieker and S. Manu, J. Appl. Phys. 71 (8), 3788 (1992).

    CAS  Article  Google Scholar 

  7. 7.

    H. Sirringhaus, N. Onda, E. Muller-Gubler, P. Muller, R. Stalder and H. von Kanel, Phys. Rev. B, 47 (16), 10567 (1993).

    CAS  Article  Google Scholar 

  8. 8.

    N. Onda, J. Henz, E. Muller, K.A. Mader and H. von Kanel, Appl. Surf. Sci. 56–58, 421 (1992).

    Article  Google Scholar 

  9. 9.

    J. Chevrier, P. Stockei, V. Le Thanh, J.M. Gay and J. Derrien, Europhys. Lett. 22 (6), 449 (1993).

    CAS  Article  Google Scholar 

  10. 10.

    M.G. Grimaldi, P. Baeri, C. Spinella and S. Logamarsino, Appl. Phys. Lett. 60 (2), 1132 (1992).

    CAS  Article  Google Scholar 

  11. 11.

    P. Tiwari, M. Bahtnagar, R. Dat and J. Narayan, Mat. Sci. Eng. B14, 23 (1992).

    CAS  Article  Google Scholar 

  12. 12.

    R.A. Neifeld, S. Gunapala, G. Liang, S.A. Shaheen, M. Croft, J. Price, D. Simmons and W.T. Hill III, Appl. Phys. Lett. 53, 703 (1988).

    CAS  Article  Google Scholar 

  13. 13.

    F.J. Grunthaner and P.J. Grunthaner, Mat. Sci. Rep. 1, 65 (1986).

    CAS  Article  Google Scholar 

  14. 14.

    L. Reimer, Transmission Electron Microscopy, 3rd ed. (Springer-Verlag, Berlin, 1993), p. 359–361.

    Google Scholar 

Download references

Acknowledgments

We would like to thank David P. Adams and David J. Eaglesham for their helpful discussions during the course of this research. This research was supported in part by NSF, Contract#: DMR9202176.

Author information

Affiliations

Authors

Corresponding author

Correspondence to O.P. Karpenko.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Karpenko, O., Olk, C., Doll, G. et al. Structural Analysis of Pulsed Laser Deposited FeSi2 Films. MRS Online Proceedings Library 320, 103–108 (1993). https://doi.org/10.1557/PROC-320-103

Download citation