The Influence of Silicon Overlayers on the Electrical Conductivity of Very Thin Chromium Films

Abstract

The influence of silicon overlayers on the electrical conductivity of 5 nm to 10 nm thick chromium films has been studied. It was found that the deposition of silicon decreases the resistivity of Cr-film by up to 24 %. Possible mechanisms for the resistance decrease due to the silicon overlayer are discussed.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    P.J. Call in Polycrystalline and Amorphous Thin Films and Devices, edited by L. Kazmerski (Academic Press, New York, 1980), p.261.

  2. 2.

    R. Glang, R.A. Holmwood, and S.R. Herd, J.Vac.Sci.Technol.4, 163 (1967).

    CAS  Article  Google Scholar 

  3. 3.

    A. Mobius, H. Vinzelberg, C. Gladun, A. Heinrich, D. Elefant, J. Schumann, and G. Zies, J.Phys.C, Solid State Phys.18, 3337 (1985).

    Article  Google Scholar 

  4. 4.

    T. Sato, A. Jono, E. Ohta, and M. Sakata, Phys.Rev.B38, 11741 (1988).

    Article  Google Scholar 

  5. 5.

    A.N. Aleshin, A.N. Ionov, R.V. Parfen’ev, I.S. Shlimak, A. Heinrich, J. Schumann, and D. Elefant, Sov.Phys.Solid State30, 398 (1988).

    Google Scholar 

  6. 6.

    K. Schroder and L. Walch, J.Vac.Soc.Tech.A9, 577 (1991).

    Article  Google Scholar 

  7. 7.

    K. Schroder and S. Nayak, Phys.Stat.Sol.(b)172, 679 (1992).

    Article  Google Scholar 

  8. 8.

    S. Nayak, M.S. Thesis, Syracuse, NY (1992).

  9. 9.

    D. Allender, J. Bray, and J. Bardeen, Phys.Rev.B7, 1020 (1973).

    Article  Google Scholar 

  10. 10.

    El Sayed, A. Mehanna, S. Arajs, N.F. Helbig, R. Aidun, and El Kattan, J.Appl.Phys.61, 4273 (1987).

    Article  Google Scholar 

  11. 11.

    N. Nishida, M. Yamaguchi, T. Furubayashi, K. Morigaki, H. Ishimoto and K. Ono, Solid State Commun.44, 305 (1982).

    CAS  Article  Google Scholar 

  12. 12.

    J.S. Arlow, D.F. Mitchel, and M.J. Graham, J.Vac.Sci.Technol.A5, 527 (1987).

    Google Scholar 

Download references

Acknowledgments

The authors greatly appreciate to Drs. E.V.Stepin and N.A.Bert for their help in electron diffraction studies and Drs. B.Y.Ber and S.Sisoev for their help in Auger electron spectroscopy studies of our films.

Author information

Affiliations

Authors

Corresponding author

Correspondence to Andrej N. Aleshin.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Aleshin, A.N., Schroder, K. The Influence of Silicon Overlayers on the Electrical Conductivity of Very Thin Chromium Films. MRS Online Proceedings Library 318, 465–470 (1993). https://doi.org/10.1557/PROC-318-465

Download citation