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Diffusion-Segregation Equation for Simulation in Heterostructures

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Abstract

Diffusion of impurity atoms or point defect species occurs simultaneously with segregation in materials that are inhomogeneous or consisting of heterostructures. Based on thermodynamic principles, a general diffusion-segregation equation (DSE) simultaneously describing the species’ diffusion and segregation behavior has been derived. The DSE treats the diffusion-segregation problems on the same fundamental level as the diffusion problems are treated by Fick’s Laws. A critical comparison of modeling diffusion-segregation phenomena using the DSE vs. previous formulations is given. The wide range of applications of the DSE is demonstrated by several examples.

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Acknowledgments

Our work on Si has been supported by National Renewable Energy Laboratory under subcontract XD-2-11004-1, and our work on GaAs has been supported by US army Research Office under contract DAAL03-89-K-0119.

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Authors and Affiliations

  1. Department of Mechanical Engineering and Materials Science, Duke University, Durham, NC, 27708-0300, USA

    R. Gafiteanu, H.-M. You, U. Göesele & T. Y. Tan

Authors
  1. R. Gafiteanu
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  2. H.-M. You
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  3. U. Göesele
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  4. T. Y. Tan
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Gafiteanu, R., You, HM., Göesele, U. et al. Diffusion-Segregation Equation for Simulation in Heterostructures. MRS Online Proceedings Library 318, 31–37 (1993). https://doi.org/10.1557/PROC-318-31

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  • DOI: https://doi.org/10.1557/PROC-318-31

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