Rapid Evaluation of Thin Film Interfacial Reactions Using Temperature-Ramped Measurements


We describe an approach for rapid evaluation of thin film interfacial reactions using a combination of temperature-ramped in situ measurements of sheet resistance, calorimetry and stress. Electrical, mechanical and thermal measurements at elevated temperatures provide detailed reaction information which is unavailable in room temperature measurements. Kinetic data is particularly useful in making comparisons with mechanistic models. The following examples are discussed:

  1. 1.

    Effects of interfacial oxygen on Ta as a diffusion barrier between Cu and Si

  2. 2.

    Effects of interfacial oxygen on the Cu/Mg reaction to form CuMg2 and Cu2Mg

  3. 3.

    Effects of the density of internal interfaces (grain boundaries) on Al2Cu dissolution and precipitation in Al-Cu alloys.

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  1. 1.

    E.G. Colgan, K.P. Rodbell, C. Cabrai Jr. and J.M.E. Harper, in Advanced Metallizations for ULSI Applications in 1993, Materials Research Society, Pittsburgh, PA (in press).

  2. 2.

    Q.Z. Hong, K. Barmak and L.A. Clevengcr, J. Appl. Phys. 72, 3423 (1992).

    CAS  Article  Google Scholar 

  3. 3.

    L.A. Clevenger, A.G. Mutschellcr, J.M.E. Harper, C. Cabrai Jr., and K. Barmak, J. Appl. Phys. 72, 4918 (1992).

    CAS  Article  Google Scholar 

  4. 4.

    K.R. Coffey, L.A. Clevengcr, K. Barmak, D.A. Rudman and C.V. Thompson, Appl. Phys. Lett. 55, 852 (1989).

    CAS  Article  Google Scholar 

  5. 5.

    P. Flinn, J. Mater. Res. 6, 1498 (1991).

    CAS  Article  Google Scholar 

  6. 6.

    J. Gupta, J.M.E. Harper, J. L. Mauer, P.G. Blauncr and D.A. Smith, Appl. Phys. Lett. 61, 663 (1992).

    CAS  Article  Google Scholar 

  7. 7.

    Q.Z. Hong, F.M. d’Heurle, J.M.E. Harper and S.Q. Hong, Appl. Phys. Lett. 62, 2637 (1993).

    CAS  Article  Google Scholar 

  8. 8.

    L. Stolt, A. Charai, F.M. d’Heurle, P.M. Fryer and J.M.E. Harper, J. Vac. Sci. Technol. A9, 1501 (1991).

    Article  Google Scholar 

  9. 9.

    L.A. Clevenger, N.A. Bojarczuk, K. Holloway, J.M.E. Harper, C. Cabrai Jr., R.G. Schad, F. Cardonc and L. Stolt, J. Appl. Phys. 73, 300 (1993).

    CAS  Article  Google Scholar 

  10. 10.

    M.-A. Nicolet, Thin Solid Films 52, 415 (1978).

    CAS  Article  Google Scholar 

  11. 11.

    B. Arcot, L.A. Clevenger, S.P. Murarka, J.M.E. Harper and C. Cabrai Jr., Mat. Res. Soc. Symp. Proc. 260, 947 (1992).

    CAS  Article  Google Scholar 

  12. 12.

    C.K. Hu, N. Mazzeo and C. Stanis, J. Mat. Chemistry and Physics 35, 95 (1993).

    CAS  Article  Google Scholar 

  13. 13.

    E.G. Colgan and K.P. Rodbeil, J. Appl. Phys. (to be published).

  14. 14.

    L.A. Clevenger, J.M.E. Harper, C. Cabrai Jr., G. Nobili, G. Ottaviani and R. Mann, J. Appl. Phys. 72, 4978 (1992).

    CAS  Article  Google Scholar 

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Harper, J.M.E., Clevenger, L.A., Colgan, E.G. et al. Rapid Evaluation of Thin Film Interfacial Reactions Using Temperature-Ramped Measurements. MRS Online Proceedings Library 318, 307–318 (1993). https://doi.org/10.1557/PROC-318-307

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