Chemical Modification of Surface Steps on SI(111) Vicinal Wafers: a Bonding Model for Phase Changes in Second Harmonic Generation

Abstract

There have been several studies of second harmonic generation (SHG) from chemically-modified vicinal Si(111) wafers. The SH fields contain one-fold (Ψ) and three-fold (3Ψ) symmetry contributions, which originate respectively from the terrace and surface step atoms. The phase of these contributions are different for native oxides, and are a function of the frequency of the incident radiation, ω. To identify the origin of these different phases for the terrace and step SH fields, we use a classical anharmonic oscillator model based on two assumptions: (a) a significant fraction of Si atoms at the steps have dangling bonds when oxides are formed below ~850°C, and (b) these step atoms are linked to atoms at the bottom of the steps by O-Si-O groups following annealing at >900°C.

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References

  1. 1.

    C. W. van Hasselt, M. A. Verheijen and Th. Rasing, Phys. Rev. B, 42, 9263 (1990).

    Article  Google Scholar 

  2. 2.

    R. W. Hollering, D. Dijkkamp and H. B. Elswijk, Surf. Sci. 243, 121 (1991).

    CAS  Article  Google Scholar 

  3. 3.

    M. A. Verheijen, C. W. van Hasselt and Th. Rasing, Surf. Sci. 251, 467 (1991).

    Article  Google Scholar 

  4. 4.

    R. W. Hollering, and M. Barmentlo, Optics Communications, 88, 141 (1992).

    Article  Google Scholar 

  5. 5.

    C. H. Bjorkman, D. R. Lee, and G. Lucovsky, MRS Symp. Proc. 202, 271 (1991).

    CAS  Article  Google Scholar 

  6. 6.

    U. Emmerichs, C. Meyer, K. Leo, H. Kurz, C. H. Bjorkman, C. E. Shearon, Jr., Y. Ma, T. Yasuda, and G. Lucovsky, MRS Symp. Proc. 281 (in press).

  7. 7.

    C. H. Bjorkman, C. E. Shearon, Jr., Y. Ma, T. Yasuda, G. Lucovsky, U. Emmerichs, C. Meyer, K. Leo, and H. Kurz, J. Vac. Sci. Technol. All, 1993, accepted.

    Google Scholar 

  8. 8.

    N. Bloembergen, Nonlinear Optics (Benjamin, New York, 1965).

    Google Scholar 

  9. 9.

    W. Daum, H.-J. Krause, U. Reichel, and H. Ibach, unpublished.

  10. 10.

    Z. Jing, G. Lucovsky and J. L. Whitten, unpublished.

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Acknowledgments

This research was supported by the U.S. Department of Energy, the National Science Foundation, and the Office of Navy Research. We acknowledge a fruitful collaboration with Professor H. Kurz and his colleges of RWTH - Aachen.

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Correspondence to Z. Jing.

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Jing, Z., Lucovsky, G. & Whitten, J.L. Chemical Modification of Surface Steps on SI(111) Vicinal Wafers: a Bonding Model for Phase Changes in Second Harmonic Generation. MRS Online Proceedings Library 318, 287–292 (1993). https://doi.org/10.1557/PROC-318-287

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