Simultaneous occurrence of multiphases was observed in the interfacial reactions of ultrahigh vacuum deposited Ti, Hf and Cr thin films on (111)Si by high resolution transmission electron microscopy in conjunction with fast Fourier transform diffraction analysis and image simulation. For the three systems, an amorphous interlayer as well as a number of crystalline phase were found to form simultaneously in the early stages of interfacial reactions. The formation of multiphases appeared to be quite general in the initial stages of interfacial reactions of UHV deposited refractory thin films. The results called for a reexamination of generally accepted “difference” in reaction sequence between bulk and thin film couples.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
K.N. Tu and J.W. Mayer, in Thin Films Interdiffusions and Reactions, edited by J.M. Poate, K.N. Tu, and J.W. Mayer (Academic, New York, 1978), P. 329.
M.A. Nicolet and S.S. Lau, in Materials and Process Characterization, edited by N.G. Einspruch and G.R. Larrabee (Academic, New York, 1983), P. 453.
M.H. Wang and L.J. Chen, Appl. Phys. Lett. 59, 2460 (1991).
W.Y. Hsieh, J.H. Lin, and L.J. Chen, Appl. Phys. Lett. 62, 1088 (1993).
R. Kilaas, Proceedings of 49th Annual Meeting of Electron Microscopy Society of America (San Francisco Press, San Francisco, CA, 1991) p. 528.
M.H. Wang and L.J. Chen, Appl. Phys. Lett. 58, 463 (1991).
U.Y. Cheng and L.J. Chen, J. Appl. Phys. 68, 4002 (1990).
J.C. Lin and Y.A. Chang, Mater. Res. Soc. Symp. Proc. 148, 3 (1989).
R.W. Walser and R.W. Bene, Appl. Phys. Lett. 28, 624 (1976).
R.W. Bene, J. Appl. Phys. 61, 1826 (1987).
U. Gosele and K.N. Tu, J. Appl. Phys. 53, 3252 (1982).
U. Gosele and K.N. Tu, J. Appl. Phys. 66, 2612 (1989).
The research was supported by the Republic of China National Science Council through Grant NSC-81-0416-E-007-501.
About this article
Cite this article
Hsieh, W., Lin, J., Wang, M. et al. Simultaneous Occurrence of Multiphases in the Interfacial Reactions of Ultrahigh Vacuum Deposited Ti, Hf and Cr Thin Films on (111)Si. MRS Online Proceedings Library 311, 323–328 (1993). https://doi.org/10.1557/PROC-311-323