Simultaneous Occurrence of Multiphases in the Interfacial Reactions of Ultrahigh Vacuum Deposited Ti, Hf and Cr Thin Films on (111)Si

Abstract

Simultaneous occurrence of multiphases was observed in the interfacial reactions of ultrahigh vacuum deposited Ti, Hf and Cr thin films on (111)Si by high resolution transmission electron microscopy in conjunction with fast Fourier transform diffraction analysis and image simulation. For the three systems, an amorphous interlayer as well as a number of crystalline phase were found to form simultaneously in the early stages of interfacial reactions. The formation of multiphases appeared to be quite general in the initial stages of interfacial reactions of UHV deposited refractory thin films. The results called for a reexamination of generally accepted “difference” in reaction sequence between bulk and thin film couples.

This is a preview of subscription content, access via your institution.

References

  1. 1

    K.N. Tu and J.W. Mayer, in Thin Films Interdiffusions and Reactions, edited by J.M. Poate, K.N. Tu, and J.W. Mayer (Academic, New York, 1978), P. 329.

  2. 2

    M.A. Nicolet and S.S. Lau, in Materials and Process Characterization, edited by N.G. Einspruch and G.R. Larrabee (Academic, New York, 1983), P. 453.

  3. 3

    M.H. Wang and L.J. Chen, Appl. Phys. Lett. 59, 2460 (1991).

    CAS  Article  Google Scholar 

  4. 4

    W.Y. Hsieh, J.H. Lin, and L.J. Chen, Appl. Phys. Lett. 62, 1088 (1993).

    CAS  Article  Google Scholar 

  5. 5

    R. Kilaas, Proceedings of 49th Annual Meeting of Electron Microscopy Society of America (San Francisco Press, San Francisco, CA, 1991) p. 528.

    Google Scholar 

  6. 6

    M.H. Wang and L.J. Chen, Appl. Phys. Lett. 58, 463 (1991).

    CAS  Article  Google Scholar 

  7. 7

    U.Y. Cheng and L.J. Chen, J. Appl. Phys. 68, 4002 (1990).

    CAS  Article  Google Scholar 

  8. 8

    J.C. Lin and Y.A. Chang, Mater. Res. Soc. Symp. Proc. 148, 3 (1989).

    CAS  Article  Google Scholar 

  9. 9

    R.W. Walser and R.W. Bene, Appl. Phys. Lett. 28, 624 (1976).

    CAS  Article  Google Scholar 

  10. 10

    R.W. Bene, J. Appl. Phys. 61, 1826 (1987).

    CAS  Article  Google Scholar 

  11. 11

    U. Gosele and K.N. Tu, J. Appl. Phys. 53, 3252 (1982).

    Article  Google Scholar 

  12. 12

    U. Gosele and K.N. Tu, J. Appl. Phys. 66, 2612 (1989).

    Article  Google Scholar 

Download references

Acknowledgments

The research was supported by the Republic of China National Science Council through Grant NSC-81-0416-E-007-501.

Author information

Affiliations

Authors

Corresponding author

Correspondence to W.Y. Hsieh.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Hsieh, W., Lin, J., Wang, M. et al. Simultaneous Occurrence of Multiphases in the Interfacial Reactions of Ultrahigh Vacuum Deposited Ti, Hf and Cr Thin Films on (111)Si. MRS Online Proceedings Library 311, 323–328 (1993). https://doi.org/10.1557/PROC-311-323

Download citation