Amorphization of Fe/Zr Multilayers by Ar-Ion-Beam-Mixing

Abstract

The Ar-ion-beam-mixing of the FeZr multilayer system is studied by conversion electron Mössbauer spectroscopy. The dependence of the amorphization process on the layer thickness and ion dose is studied in detail for samples with Fe to Zr ratio of 1 and 0.5 and modulation wavelength of 5 to 90 nm.

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Acknowledgments

The financial support from the grants no. 2 0419 91 01 from the Polish Committee of Scientific Research and 01-1-0017-9 from the Institute of Electronic Materials Technology is gratefully acknowledged.

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Correspondence to M. Kopcewicz.

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Kopcewicz, M., Jagielski, J., Stobiecki, T. et al. Amorphization of Fe/Zr Multilayers by Ar-Ion-Beam-Mixing. MRS Online Proceedings Library 311, 197–202 (1993). https://doi.org/10.1557/PROC-311-197

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