Pulsed-Laser Annealing of Silicon Films

Abstract

Phase transition between crystalline and amorphous states was studied through 30ns-pulsed XeCl laser induced melting of silicon films. Crystallization occurs through interface controlled growth for laser energy above surface melting threshold. Grain size is smaller than 100nm because of short melt duration (<80ns). Amorphization is observed in silicon films thinner than 40nm when the silicon films are completely melted then solidified homogeneously. The amorphized films have a large defect density (~1020 cm−3 eV−1), which is remarkably reduced by hydrogen plasma treatment for 1 minute. This paper also discusses the application to fabrication of thin film transistors with a high carrier mobility (>100cm2/Vs) at a low temperature of 250°C.

This is a preview of subscription content, access via your institution.

References

  1. [1]

    R.F. Wood, D.H. Lowndes, and J. Narayan, Appl. Phys.Lett. 44, 770 (1984).

    CAS  Article  Google Scholar 

  2. [2]

    M.O. Thompson, G.J. Galvin, J.W. Mayer, P.S. Peercy, J.M. Poate, D.C. Jacobson, A.G. Cullis, and N.G. Chew, Phys.Rev.Lett. 52, 2360 (1984).

    CAS  Article  Google Scholar 

  3. [3]

    S.R. Stiffler, M.O. Thompson, and P.S. Peercy, Mater. Res. Soc. Symp. Proc. 100, 505 (1988).

    CAS  Article  Google Scholar 

  4. [4]

    P.L. Liu, R. Yen, N. Bloembergen, and R.T. Hodgson, Appl. Phys. Lett. 34, 864 (1979).

    CAS  Article  Google Scholar 

  5. [5]

    R. Tsu, R.T. Hodgson, T.Y. Tan, and J.E. Baglin, Phys.Rev.Lett. 42, 1356 (1979).

    CAS  Article  Google Scholar 

  6. [6]

    A.G. Cullis, H.C. Webber, N.G. Chew, J.M. Poate, and P. Baeri, Phys.Rev.Lett. 49, 219 (1982).

    CAS  Article  Google Scholar 

  7. [7]

    S.U. Campisano, D.C. Webber, J.M. Poate, A.G. Cullis, and N.G. Chew, Appl. Phys.Lett. 46, 846 (1985).

    CAS  Article  Google Scholar 

  8. [8]

    M.O. Thompson, J.W. Mayer, A.G. Cullis, H.C. Webber, N.G. Chew, J.M. Poate, and D.C. Jacobson, Phys.Rev.Lett. 50, 896 (1983).

    CAS  Article  Google Scholar 

  9. [9]

    T. Sameshima and S. Usui, Mat. Res.Soc. Symp. Proc. 71, 435 (1986).

    CAS  Article  Google Scholar 

  10. [10]

    T. Sameshima, M. Hara and S. Usui, Jpn. J. Appl. Phys. 28, 1789 (1989).

    CAS  Article  Google Scholar 

  11. [11]

    T. Sameshima, M. Hara, and S. Usui, Jpn. J. Appl. Phys. Lett. 29, 548 (1990).

    Article  Google Scholar 

  12. [12]

    T. Sameshima, M. Hara, N. Sano, and S. Usui, Jpn. J.Appl.Phys. Lett. 29, 1363 (1990).

    Article  Google Scholar 

  13. [13]

    T. Sameshima and S. Usui, J. Appl. Phys. 70, 1281 (1991).

    CAS  Article  Google Scholar 

  14. [14]

    T. Sameshima and S. Usui, Appl. Phys. Lett. 59, 2724 (1991).

    CAS  Article  Google Scholar 

  15. [15]

    T. Sameshima and S. Usui, Proc in Mat. Res. Symp. 235, 81 (1992).

    Google Scholar 

  16. [16]

    Z. Iqubal, and S. Veprek, J. Phys. C15, 377 (1982).

    Google Scholar 

  17. [17]

    N.F. Mott, Philos.Mag. 19, 835 (1969) 835.

    CAS  Article  Google Scholar 

  18. [18]

    K. Murase, A. Takeda and T. Mizushima, Jpn.J.Appl.Phys. 21, 561 (1982).

    CAS  Article  Google Scholar 

  19. [19]

    J. Tauc, R. Crigrovici, and A. Vancu, Phys.Status Solidi. 15, 627 (1966).

    CAS  Article  Google Scholar 

  20. [20]

    G.D. Cody, T. Tiedje, B. Abeles, B. Brooks, Y. Goldstein, Phys. Rev. Lett. 47, 1480 (1981).

    CAS  Article  Google Scholar 

  21. [21]

    R.B. Iverson and R. Reif, J. Appl. Phys. 57, 5169 (1985).

    CAS  Article  Google Scholar 

  22. [22]

    H.S. Carslaw and J.C. Jager, Conduction of Heat in Solids (Oxford University Oxford, (1959), Chap.2.

    Google Scholar 

  23. [23]

    R.F. Wood and G.E. Giles, Phys.Rev. B23, 2923 (1981).

    Article  Google Scholar 

  24. [24]

    S.R. Stiffler, M.O. Thompson, and P.S. Peercy, Phys. Rev. Lett. 60, 2519 (1988).

    CAS  Article  Google Scholar 

  25. [25]

    J.R. Chelikowsky and M.L. Cohen, Phys.Rev. B10, 5095 (1974).

    Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Sameshima, T. Pulsed-Laser Annealing of Silicon Films. MRS Online Proceedings Library 283, 679–689 (1992). https://doi.org/10.1557/PROC-283-679

Download citation