Formation Mechanism of Microporous Siucon: Predictions and Experimental Results


Recently we presented a formation mechanism for micro-porous silicon which is based on a depletion of holes in the porous region due to quantum confinement. This theory allows predictions concerning the dependence of the porous morphology on the formation conditions. It is the purpose of this work to check whether these predictions are in accordance with experimental observations.

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Lehmann, V., Gösele, U. Formation Mechanism of Microporous Siucon: Predictions and Experimental Results. MRS Online Proceedings Library 283, 27–32 (1992).

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