Formation Mechanism of Microporous Siucon: Predictions and Experimental Results

Abstract

Recently we presented a formation mechanism for micro-porous silicon which is based on a depletion of holes in the porous region due to quantum confinement. This theory allows predictions concerning the dependence of the porous morphology on the formation conditions. It is the purpose of this work to check whether these predictions are in accordance with experimental observations.

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References

  1. (1)

    V. Lehmann, Adv. Mater. 4, 762–764, (1992)

    CAS  Article  Google Scholar 

  2. (2)

    V. Lehmann, U. Gösele, Appl. Phys. Lett. 58, 856, (1991)

    CAS  Article  Google Scholar 

  3. (3)

    V. Lehmann, U. Gösele, MRS Symp. Proc. Vol. 256, 3–6 (1991)

    Article  Google Scholar 

  4. (4)

    L.T. Canham, Appl. Phys. Lett. 57, 1046, (1990)

    CAS  Article  Google Scholar 

  5. (5)

    P. Scherrer, Nachr. Ges. Wiss. Göttingen, 98, (1918)

  6. (6)

    G.K. Williamson, W. Hall, Acta Med. 1, 22, (1953)

    CAS  Google Scholar 

  7. (7)

    V. Lehmann, B. Jobst, T. Muschik, A. Kux, V. Petrova-Koch, to be published in Jap. J. Appl. Phys.

  8. (8)

    T. Asano, K. Higa, S. Aoki, M. Tonouchi, T. Miyasato, Jpn.J. Appl. Phys. 31, L373–L375 Part 2, No.4A, (1992)

    CAS  Article  Google Scholar 

  9. (9)

    N. Nogushi, I. Suemune, M. Yamanishi, G.C. Hua, N. Otsuka, Jpn. J. Appl. Phys. 31 (1992) Part 2, No.4B

  10. (10)

    K.H. Jung, S. Shih, T.Y. Hsieh, J.C. Campbell, D.L. Kwong, T. George, T.L. Lin, H.Y. Liu, J. Zavada, S. Novak, MRS Syp. Proc. Vol. 256 (1991), 31–34

    Article  Google Scholar 

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Lehmann, V., Gösele, U. Formation Mechanism of Microporous Siucon: Predictions and Experimental Results. MRS Online Proceedings Library 283, 27–32 (1992). https://doi.org/10.1557/PROC-283-27

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