Thermal and Mechanical Properties of Diamond-Like a-C:H Films

Abstract

Diamond-like amorphous carbon and hydrogenated amorphous carbon films (DLC) prepared by rf sputtering have been characterized by means of measurements of optical gap, hardness and Young's modulus. Preliminary results of the application of the photothermal displacement technique (PTD) are also reported, confirming that this method can in principle be applied for a more complete characterization of DLC films at room temperature and low temperatures.

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Correspondence to G. Amato or G. Benedetto or L. Boarino or F. Demichelis or C. F. Pirri or R. Spagnolo or A. Tagliaferro.

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Amato, G., Benedetto, G., Boarino, L. et al. Thermal and Mechanical Properties of Diamond-Like a-C:H Films. MRS Online Proceedings Library 270, 475–480 (1992). https://doi.org/10.1557/PROC-270-475

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