Low Temperature Synthesis of Carbide Thin Films by Pulsed Laser Deposition (Pld)

Abstract

Thin films of titanium carbide (TiC) and boron carbide (B4C) were grown by excimer pulsed laser deposition (PLD) at room temperature (RT) and 300°C. Films were deposited using the output of an excimer laser operating with KrF gas (λ = 248 nm, 15 ns pulse duration) to ablate hot-pressed targets. Film chemistry, morphology, and crystallinity were investigated. Stoichiometric, crystalline TiC films were grown on 440C stainless steel and NaCl substrates at room temperature and at 300°C. The films grown on NaCI were nanocrystallinc, cubic TiC, with a grain size ranging between 2 and 10 nm in diameter. Boron carbide films were grown on silicon {100} substrates at room temperature and at 300°C. Film chemistry and stoichiometry duplicated that of the B4C target, which contained B4C and a mixed C-B-O-N binder phase. SEM analysis indicated that the morphology of the films was uniform, nonporous, and fine-grained. The films exhibited good adhesion and wear resistance, based on friction and wear data collected with a ball-on-disc tribometer.

This is a preview of subscription content, access via your institution.

References

  1. 1.

    T. Spalvins, “Microstructural and Wear Properties of Sputtered Carbides and Silicides”, Wear of Materials 1977, ASME, 1977.

    Google Scholar 

  2. 2.

    L.E. Pope and J.K.G. Panitz, Surface and Coatings Technology, 36 (1988) 341.

    CAS  Article  Google Scholar 

  3. 3

    P.S. Kisly in Science of Hard Materials ed. by E.A. Almond, C.A. Brookes, and R. Warren, Institute of Physisc Conference Series Number 75 (1984), Adam Hilger Ltd., Bristol, U.K., pp 107–136.

  4. 4.

    G. Georgiev, N. Feschiev, D. Popov, and Z. Uzuuov, Vacuum 36, 595 (1986).

    CAS  Article  Google Scholar 

  5. 5.

    M. Eizenberg and S.P. Murarka, J. Appl. Phys. 54, 3190 (1983).

    CAS  Article  Google Scholar 

  6. 6.

    J.E. Sundgren, B.-O Johansson, H.T.G. Hentzell, and S.-E. Karlsson, Thin Solid Films 105, 385 (1983).

    CAS  Article  Google Scholar 

  7. 7.

    M.S. Donley, P.T. Murray, S.A. Barber, and T.W. Haas, Surface and Coatings Technology, 36, 329 (1988).

    CAS  Article  Google Scholar 

  8. 8.

    M.S. Donley, N.T. McDevitt, T.W. Haas, P.T. Murray, and J.T. Grant, Thin Solid Films 168, 335 (1989).

    CAS  Article  Google Scholar 

  9. 9.

    J.S. Zabinski, M.S. Donley, V.J. Dyhouse, and N.T. McDevitt, submitted to Thin Solid Films 20 July 1991.

    Google Scholar 

  10. 10.

    Hideo Ihara, Yukinobu Kumashiro, Akiro Itoh, and Kogoro Meada, Japan J. Appl. Phys. 12, 1462 (1973).

    CAS  Article  Google Scholar 

  11. 11.

    O. Rist, P.T. Murray. Materials Letters. 10(7.8) 323 (1991).

    CAS  Article  Google Scholar 

Download references

Author information

Affiliations

Authors

Corresponding author

Correspondence to M. S. Donley.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Donley, M.S., Zabinski, J.S., Sessler, W.J. et al. Low Temperature Synthesis of Carbide Thin Films by Pulsed Laser Deposition (Pld). MRS Online Proceedings Library 236, 461–466 (1991). https://doi.org/10.1557/PROC-236-461

Download citation