The Synthesis of Metal Oxide Films from Compound Powder Targets

MRS Online Proceedings Library volume 236, pages331–334(1991)Cite this article

Abstract

The paper presents the results of AES, SIMS, RBS and electron microscopy investigation of compound metal oxide films. The films were deposited by sputtering compound targets with oxygen ion beam, extracted from hollow cold cathode ion source.

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References

  1. 1

    A.I. Stognij and V.V. Tokarev, Pribory i Tekhnika Eksperimenta, 3, 142 (1991).

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    G. Betz and G.K. Wehner, in Sputtering by Particle Bonbardment II, edited by R. Behrisch (Springer-Verlag, Berlin, 1983),pp. 24–98.

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    H.H. Andersen, in Ion Implantation and Beam Processing, eds. S.S. Williams, J.M. Poate (Acad. Press, Australia, 1984).

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Affiliations

  1. Institute of Solid State and Semiconductor Physics, P.Brovka 17, Minsk, 220072, USSR

    A. I. Stognij, V. V. Tokarev & Yu. N. Mitin

Authors
  1. A. I. Stognij
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  2. V. V. Tokarev
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  3. Yu. N. Mitin
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Correspondence to A. I. Stognij.

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Stognij, A.I., Tokarev, V.V. & Mitin, Y.N. The Synthesis of Metal Oxide Films from Compound Powder Targets. MRS Online Proceedings Library 236, 331–334 (1991). https://doi.org/10.1557/PROC-236-331

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