The paper presents the results of AES, SIMS, RBS and electron microscopy investigation of compound metal oxide films. The films were deposited by sputtering compound targets with oxygen ion beam, extracted from hollow cold cathode ion source.
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A.I. Stognij and V.V. Tokarev, Pribory i Tekhnika Eksperimenta, 3, 142 (1991).
G. Betz and G.K. Wehner, in Sputtering by Particle Bonbardment II, edited by R. Behrisch (Springer-Verlag, Berlin, 1983),pp. 24–98.
H.H. Andersen, in Ion Implantation and Beam Processing, eds. S.S. Williams, J.M. Poate (Acad. Press, Australia, 1984).
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Stognij, A.I., Tokarev, V.V. & Mitin, Y.N. The Synthesis of Metal Oxide Films from Compound Powder Targets. MRS Online Proceedings Library 236, 331–334 (1991). https://doi.org/10.1557/PROC-236-331