Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture

Abstract

The origin of the ArF excimer laser induced luminescence from a WF6/H2/Ar gas mixture was investigated. The experiments prove that the emission originates from excited W clusters with a size of about 10-20 nm. The influence of the H2 and Ar concentrations, the laser fluence and the repetition rate on the light intensity was studied.

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Acknowledgement

The authors thank to Drs. U. Jansson and J. Lu for the ESCA and TEM measurements. Financial support by the Swedish Natural Science Research Council is gratefully acknowledged.

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Correspondence to P. Heszler.

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Heszler, P., Mogyorósi, P. & Carlsson, J. Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture. MRS Online Proceedings Library 236, 123–126 (1991). https://doi.org/10.1557/PROC-236-123

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