Ferroelectric oxide films have been studied for their potential application as integrated optical materials and nonvolatile memories. Electro-optic properties of potassium niobate (KNbO3) thin films have been measured and the results correlated to the microstructures observed. The growth parameters necessary to obtain single phase perovskite lead zirconate titanate (PZT) thin films are discussed. Hysteresis and fatigue measurements of the PZT films were performed to determine their characteristics for potential memory devices.
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
B. A. Tuttle, MRS Bulletin Oct./Nov. 40, 40–45 (1987).
R. L. Holman, L. M. A. Johnson, and D. P. Skinner, in Proceedings of the 6th IEEE Symp. on the Applications of Ferroelectrics (IEEE, New York, 1986), pp. 32–40.
T. M. Graettinger, S. H. Rou, M. S. Ameen, O. Auciello, and A. I. Kingon, Appl. Phys. Lett. 58(18), 1964–1966 (1991).
A. R. Krauss, O. Auciello, A. I. Kingon, M. S. Ameen, Y. L. Liu, T. Barr, T. M. Graettinger, S. H. Rou, C. N. Soble, and D. M. Gruen, Appl. Surf. Science 46, 67 (1990)
O. Auciello, M. S. Ameen, A. R. Krauss, A. I. Kingon, and M. A. Ray in Beam-Solid Interactions: Physical Phenomena, edited by J. A. Knapp, P. Borgesen, and R. A. Zuhr (Mater. Res. Soc. Proc. 157, Pittsburgh, PA 1990) pp. 287–292.
S. H. Rou, P. D. Hren, J. J. Hren, T. M. Graettinger, M. S. Ameen, O. Auciello, and A. I. Kingon in High Resolution Electron Microscopy of Defects in Materials, edited by R. Sinclair, D. J. Smith, and U. Dahmen (Meter. Res. Soc. Proc. 183, Pittsburgh, PA 1990) pp. 285–290.
S. H. Rou, J. J. Hren, P. D. Hren, T. M. Graettinger, M. S. Ameen, O. Auciello, and A. I. Kingon in Electron Microscopy 1990: Proceedings of the XIIth International Conress for Electron Microscopy. Vol. 4: Material Sciences (San Francisco Press, San Francisco, 1990) pp. 466–467.
S. H. Rou, PhD Thesis, North Carolina State University, 1991.
S. H. Rou, presented at the 1991 MRS Spring Meeting, Los Angeles, CA, 1991 (to be published in MRS symposium proceedings).
H. Adachi, T. Kawaguchi, K. Setsune, K. Ohji, and K. Wasa, Appl. Phys. Lett. 42(10), 867–868 (1983).
A. Wu, F. Wang, C. Bustamante in Ferroelectric Thin Films, edited by E. R. Meyers and A. I. Kingon (Mater. Res. Soc. Proc. 200, Pittsburgh, PA 1990) pp. 261–266.
H. Adachi, T. Mitsuyu, O. Yamazaki, and K. Wasa, J, Appl. Phys. 60(2), 736–741 (1986).
P. D. Hren, presented at the International Symposium on Integrated Ferroelectrics, Colorado Springs, CO, 1991 (to be published in Ferroelectrics).
H. N. AI-Shareef, presented at the American Ceramic Society 93rd Annual Meeting, Cincinnati, OH, 1991 (to be published in Ceramic Transactions).
D. J. Lichtenwalner (submitted to the J. Appl. Phys., May 1991).
The authors would like to acknowledge the National Science Foundation, the Office of Naval Research, and the Defense Advanced Research Projects Agency for support of this work.
About this article
Cite this article
Graettinger, T.M., Auciello, O., Ameen, M.S. et al. Ion Beam Sputter Deposition Of Ferroelectric Oxide Thin Films. MRS Online Proceedings Library 223, 273 (1991). https://doi.org/10.1557/PROC-223-273