Ion Beam Sputter Deposition Of Ferroelectric Oxide Thin Films


Ferroelectric oxide films have been studied for their potential application as integrated optical materials and nonvolatile memories. Electro-optic properties of potassium niobate (KNbO3) thin films have been measured and the results correlated to the microstructures observed. The growth parameters necessary to obtain single phase perovskite lead zirconate titanate (PZT) thin films are discussed. Hysteresis and fatigue measurements of the PZT films were performed to determine their characteristics for potential memory devices.

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  1. 1.

    B. A. Tuttle, MRS Bulletin Oct./Nov. 40, 40–45 (1987).

    Article  Google Scholar 

  2. 2.

    R. L. Holman, L. M. A. Johnson, and D. P. Skinner, in Proceedings of the 6th IEEE Symp. on the Applications of Ferroelectrics (IEEE, New York, 1986), pp. 32–40.

    Google Scholar 

  3. 3.

    T. M. Graettinger, S. H. Rou, M. S. Ameen, O. Auciello, and A. I. Kingon, Appl. Phys. Lett. 58(18), 1964–1966 (1991).

    CAS  Article  Google Scholar 

  4. 4.

    A. R. Krauss, O. Auciello, A. I. Kingon, M. S. Ameen, Y. L. Liu, T. Barr, T. M. Graettinger, S. H. Rou, C. N. Soble, and D. M. Gruen, Appl. Surf. Science 46, 67 (1990)

    CAS  Article  Google Scholar 

  5. 5.

    O. Auciello, M. S. Ameen, A. R. Krauss, A. I. Kingon, and M. A. Ray in Beam-Solid Interactions: Physical Phenomena, edited by J. A. Knapp, P. Borgesen, and R. A. Zuhr (Mater. Res. Soc. Proc. 157, Pittsburgh, PA 1990) pp. 287–292.

    CAS  Article  Google Scholar 

  6. 6.

    S. H. Rou, P. D. Hren, J. J. Hren, T. M. Graettinger, M. S. Ameen, O. Auciello, and A. I. Kingon in High Resolution Electron Microscopy of Defects in Materials, edited by R. Sinclair, D. J. Smith, and U. Dahmen (Meter. Res. Soc. Proc. 183, Pittsburgh, PA 1990) pp. 285–290.

    CAS  Google Scholar 

  7. 7.

    S. H. Rou, J. J. Hren, P. D. Hren, T. M. Graettinger, M. S. Ameen, O. Auciello, and A. I. Kingon in Electron Microscopy 1990: Proceedings of the XIIth International Conress for Electron Microscopy. Vol. 4: Material Sciences (San Francisco Press, San Francisco, 1990) pp. 466–467.

    Google Scholar 

  8. 8.

    S. H. Rou, PhD Thesis, North Carolina State University, 1991.

    Google Scholar 

  9. 9.

    S. H. Rou, presented at the 1991 MRS Spring Meeting, Los Angeles, CA, 1991 (to be published in MRS symposium proceedings).

  10. 10.

    H. Adachi, T. Kawaguchi, K. Setsune, K. Ohji, and K. Wasa, Appl. Phys. Lett. 42(10), 867–868 (1983).

    CAS  Article  Google Scholar 

  11. 11.

    A. Wu, F. Wang, C. Bustamante in Ferroelectric Thin Films, edited by E. R. Meyers and A. I. Kingon (Mater. Res. Soc. Proc. 200, Pittsburgh, PA 1990) pp. 261–266.

    CAS  Article  Google Scholar 

  12. 12.

    H. Adachi, T. Mitsuyu, O. Yamazaki, and K. Wasa, J, Appl. Phys. 60(2), 736–741 (1986).

    CAS  Article  Google Scholar 

  13. 13.

    P. D. Hren, presented at the International Symposium on Integrated Ferroelectrics, Colorado Springs, CO, 1991 (to be published in Ferroelectrics).

  14. 14.

    H. N. AI-Shareef, presented at the American Ceramic Society 93rd Annual Meeting, Cincinnati, OH, 1991 (to be published in Ceramic Transactions).

  15. 15.

    D. J. Lichtenwalner (submitted to the J. Appl. Phys., May 1991).

    Google Scholar 

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The authors would like to acknowledge the National Science Foundation, the Office of Naval Research, and the Defense Advanced Research Projects Agency for support of this work.

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Correspondence to Thomas M. Graettinger or O. Auciello or M. S. Ameen or H. N. Al-Shareef or K. Gifford or A. I. Kingon.

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Graettinger, T.M., Auciello, O., Ameen, M.S. et al. Ion Beam Sputter Deposition Of Ferroelectric Oxide Thin Films. MRS Online Proceedings Library 223, 273 (1991).

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