Abstract
The process of the phase transformation of evaporated films of TiO0.5 has been demonstrated by in situ annealing using an electron microscope. Single crystals of the δ-phase, whose structure is identified with Andersson’s hexagonal model, precipitate during annealing. Crystal structure images in cooperation with the calculated images reveal that the inner parts of the δ-phase crystal have various thickness. The transition structures I and II having ordered vacancies of titanium and oxygen respectively also appear on annealing. The difference in the distortion of their lattices from the parent rock-salt type lattice suggests that the effective atomic volume of titanium is larger than that of oxygen in the crystal of the transition structure. The observed transformations, α-phase → δ; phase → transition structure, are explained by consideration of the structural relationships among these phases.
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Yamada, Y., Yoshida, K., Ota, H. et al. Phase Transformations in Titanium Oxide Evaporated Films by Annealing. MRS Online Proceedings Library 21, 155–160 (1983). https://doi.org/10.1557/PROC-21-155
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DOI: https://doi.org/10.1557/PROC-21-155